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首页> 外文期刊>Applied Surface Science >Tailoring the wettability of patterned silicon surfaces with dual-scale pillars:From hydrophilicity to superhydrophobicity
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Tailoring the wettability of patterned silicon surfaces with dual-scale pillars:From hydrophilicity to superhydrophobicity

机译：量身定制具有双尺度柱的图案化硅表面的润湿性：从亲水性到超疏水性

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摘要

Wettability tailoring of patterned silicon surface has great potential in fields producing integrated circuits, solar cells, sensors, detectors, and microano electromechanical systems. The present paper presents a convenient yet effective method of combining reactive ion etching and catalyzed etching to prepare silicon surface with micro-nano dual-scale pillars. The experimental results indicate that the hydrophilic surface transformed to a superhydrophobic surface when micro-nano dual-scale pillars were formed. The surface preserved superhydrophobicity even when the geometric parameters of the micropillars were changed. Overhangs of water drops on steep micro-nano dual-scale pillars result in superhydrophobicity. This method offers a new way for tailoring the wettability of patterned silicon surfaces.
机译：图案化硅表面的润湿性定制在生产集成电路，太阳能电池，传感器，检测器和微/纳米机电系统的领域中具有巨大潜力。本文提出了一种结合反应性离子刻蚀和催化刻蚀制备具有微纳米双尺度柱的硅表面的便捷而有效的方法。实验结果表明，当形成微纳米双尺度柱时，亲水性表面转变为超疏水性表面。即使微柱的几何参数发生变化，表面仍保留超疏水性。陡峭的微纳米双尺度柱上的水滴悬垂导致超疏水性。这种方法提供了一种新的方式来调整图案化硅表面的润湿性。

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  • 来源
    《Applied Surface Science》 |2011年第17期|p.7689-7692|共4页
  • 作者

    Yang He; Chengyu Jiang; Hengxu Yin; Weizheng Yuan;

  • 作者单位

    Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, PR China;

    Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, PR China;

    Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, PR China;

    Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, PR China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    wettability; superhydrophobicity; hydrophilicity; patterned silicon surface;

    机译：润湿性超疏水性亲水性图案化的硅表面;

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