Study Of Microstructure And Nanomechanical Properties Of Zr Films Prepared By Pulsed Magnetron Sputtering

著录项

• 来源
  《Applied Surface Science》 |2011年第23期|p.9909-9914|共6页
• 作者

  Akash Singh; P. Kuppusami; R.Thirumurugesan; R. Ramaseshan; M. Kamruddin; S. Dash; V. Ganesan; E. Mohandas;

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• 作者单位

  Materials Synthesis and Structural Characterization Section, Physical Metallurgy Croup, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

  Materials Synthesis and Structural Characterization Section, Physical Metallurgy Croup, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

  Materials Synthesis and Structural Characterization Section, Physical Metallurgy Croup, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

  Surface and Nano Science Division, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

  Surface and Nano Science Division, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

  Surface and Nano Science Division, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

  UCC-DAE Consortium for Scientific Research, Indore 452 017, India;

  Materials Synthesis and Structural Characterization Section, Physical Metallurgy Croup, Indira Candhi Centre for Atomic Research, Kalpakkam 603 102, India;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Sputtering; Zirconium; X-ray diffraction; Nanohardness; Scratch test;

  机译：溅射;锆;X射线衍射;纳米硬度;划痕试验;