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(Ti,Al,Si,C)N nanocomposite coatings synthesized by plasma-enhanced magnetron sputtering

机译：等离子体增强磁控溅射合成（Ti，Al，Si，C）N纳米复合涂层

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摘要

Materials' surface service property could be enhanced by transition metal nitride hard coatings due to their high hardness, wear and high temperature oxidation resistance, but the higher friction coefficient (0.4-0.9) of which aroused terrible abrasion. In this work, quinternary (Ti,Al,Si,C)N hard coating 3-4 jxm was synthesized at 300 ℃ using plasma enhanced magnetron sputtering system. It was found that the coating's columnar crystals structure was restrained obviously with the increase of C content and a non-columnar crystals growth mode was indicated at the C content of 33.5 at.%. Both the XRD and TEM showed that the (Ti,Al,Si,C)N hard coatings had unique nanocomposite structures composed of nanocrystalline and amorphous nc-(Ti,Al)(C,N)c-AlN/a-Si_3N_4/a-Si/a-C. However, the coatings were still super hard with the highest hardness of 41 GPa in spite of the carbon incorporation. That a-C could facilitate the graphi-tization process during the friction process which could improve the coating's tribological performance. Therefore, that nanocomposite (Ti,Al,Si,C)N coatings with higher hardness (>36 GPa) and a lower friction coefficient (<0.2) could be synthesized and enhance the tribological performance and surface properties profoundly.
机译：过渡金属氮化物硬质涂层具有较高的硬度，耐磨性和高温抗氧化性，可以提高材料的表面使用性能，但是较高的摩擦系数（0.4-0.9）引起了严重的磨损。在这项工作中，使用等离子增强磁控溅射系统在300℃下合成了3-4 jxm的季铵（Ti，Al，Si，C）N硬质涂层。发现随着C含量的增加，涂层的柱状晶体结构受到明显的抑制，并且在C含量为33.5at。％时，表明了非柱状晶体的生长方式。 XRD和TEM均表明，（Ti，Al，Si，C）N硬质涂层具有独特的纳米复合结构，由纳米晶和非晶态的nc-（Ti，Al）（C，N）/ nc-AlN / a-Si_3N_4 /组成。 a-Si / aC。但是，尽管掺入了碳，但涂层仍是超硬的，具有最高的41 GPa硬度。 a-C可以促进摩擦过程中的石墨化过程，从而可以改善涂层的摩擦学性能。因此，可以合成具有更高的硬度（> 36 GPa）和更低的摩擦系数（<0.2）的纳米复合（Ti，Al，Si，C）N涂层，从而显着提高摩擦性能和表面性能。

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