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Spray pyrolytic deposition of transparent aluminum oxide (Al_2O_3) films

机译：喷涂热解沉积透明氧化铝（Al_2O_3）膜

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摘要

Optically transparent Al_2O_3 films has been synthesized, on quartz substrates at 500,600 and 700 ℃, from 0.02 M aluminum acetyl acetonate (Al(acac)_3) in ethanol, by using ultrasonic spray pyrolysis technique. The films synthesized at 500,600 and 700 ℃ are amorphous having average particle sizes 27 ± 6,18 ± 3 and 14±3, respectively. The films are found to be 95% optically transparent in the visible region. The optical transparency of the films in the ultraviolet region is found to increase with increase in deposition temperature. The observed increase in optical band gap and decrease in refractive index is attributed to the decrease in particle size with increase in deposition temperature. The stoichiometry and chemical bonding of the amorphous film studied using XPS and FTIR spectroscopy revealed the presence chemisorbed oxygen.
机译：利用超声喷雾热解技术，在乙醇中的0.02 M乙酰丙酮铝（Al（acac）_3）在500,600和700℃的石英基板上合成了光学透明的Al_2O_3薄膜。在500,600和700℃合成的薄膜是无定形的，平均粒径分别为27±6,18±3和14±3。发现该膜在可见光区域是95％光学透明的。发现随着沉积温度的升高，膜在紫外区域的光学透明性增加。观察到的光学带隙的增加和折射率的降低归因于随着沉积温度的升高而粒径减小。使用XPS和FTIR光谱研究的非晶膜的化学计量和化学键合表明存在化学吸附的氧。

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  • 来源
    《Applied Surface Science》 |2011年第3期|p.1091-1096|共6页
  • 作者

    Baban P. Dhonge; Tom Mathews; S. Tripura Sundari; C. Thinaharan; M. Kamruddin; S. Dash; A.K.Tyagi;

  • 作者单位

    Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

    Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

    Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

    Corrosion Science and Technology Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

    Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

    Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

    Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102, TN, India;

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  • 正文语种 eng
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  • 关键词

    spray pyrolysis; transparent Al_2O_3 thin films; refractive index and band gap;

    机译：喷雾热解透明的Al_2O_3薄膜;折射率和带隙;

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