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Microstructure and mechanical properties of reactive magnetron sputtered Ti-B-C-N nanocomposite coatings

机译：反应磁控溅射Ti-B-C-N纳米复合涂层的组织与力学性能

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摘要

Ti-B-C-N nanocomposite coatings with different C contents were deposited on Si(100) and high speed steel (W18Cr4V) substrates by closed-field unbalanced reactive magnetron sputtering in the mixture of argon, nitrogen and acetylene gases. These films were subsequently characterized ex situ in terms of their microstructures by X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM), their nanohardness/elastic modulus and facture toughness by nano-indention and Vickers indentation methods, and their surface morphology using atomic force microscopy (AFM). The results indicated that, in the studied composition range, the deposited Ti-B-C-N coatings exhibit nanocomposite based on TiN nanocrystallites. When the C_2H_2 flow rate is small, incorporation of small amount of C promoted crystallization of Ti-B-C-N nanocomposite coatings, which resulted in increase of nano-grain size and mechanical properties of coatings. A maximum grain size of about 8 nm was found at a C_2H_2 flux rate of 1 seem. However, the hardness, elastic modulus and fracture toughness values were not consistent with the grain size. They got to their maximum of 35.7GPa, 363.1 GPa and 2.46MPam~1/2, respectively, at a C_2H_2 flow rate of 2 seem(corresponding to about 6nm in nano-grain size). Further increase of C content dramatically decreased not only grain size but also the mechanical properties of coatings. The presently deposited Ti-B-C-N coatings had a smooth surface. The roughness value was consistent with that of grain size.
机译：通过在氩气，氮气和乙炔气体的混合气体中进行封闭场不平衡反应磁控溅射，将具有不同C含量的Ti-B-C-N纳米复合涂层沉积在Si（100）和高速钢（W18Cr4V）基底上。随后，通过X射线衍射（XRD）和高分辨率透射电子显微镜（HRTEM）对这些薄膜的显微结构进行异位表征，通过纳米压痕和维氏压痕方法对其纳米硬度/弹性模量和断裂韧性进行表征，以及使用原子力显微镜（AFM）的表面形态。结果表明，在所研究的组成范围内，沉积的Ti-B-C-N涂层表现出基于TiN纳米微晶的纳米复合材料。当C_2H_2流量较小时，少量C的掺入会促进Ti-B-C-N纳米复合涂层的结晶，从而导致纳米晶粒尺寸和涂层力学性能的增加。在1sccm的C_2H_2通量速率下发现最大晶粒尺寸为约8nm。但是，硬度，弹性模量和断裂韧性值与晶粒尺寸不一致。在2sccm的C_2H_2流速下（对应于约6nm的纳米颗粒尺寸），它们分别达到最大35.7GPa，363.1 GPa和2.46MPam〜1/2。 C含量的进一步增加不仅显着降低了晶粒尺寸，而且显​​着降低了涂层的机械性能。目前沉积的Ti-B-C-N涂层具有光滑的表面。粗糙度值与晶粒尺寸一致。

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  • 来源
    《Applied Surface Science》 |2011年第3期|p.1021-1026|共6页
  • 作者

    QH.Luo; Y.H.Lu;

  • 作者单位

    Science Center for Materials Service Safety, University of Science and Technology, Beijing, Beijing 100083, China,Beijing Institute of Aeronautical Materials, Beijing 100095, China;

    Science Center for Materials Service Safety, University of Science and Technology, Beijing, Beijing 100083, China;

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  • 正文语种 eng
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  • 关键词

    Ti-B-C-N coatings; nanocomposite; microstructure; mechanical properties; surface roughness;

    机译：Ti-B-C-N涂层;纳米复合材料微观结构机械性能表面粗糙度;

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