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Effect of nitrogen partial pressure on Al-Ti-N films deposited by arc ion plating

机译：氮分压对电弧离子镀Al-Ti-N薄膜的影响

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摘要

AlTiN films with different nitrogen partial pressures were deposited using arc ion plating (AIP) technique. In this study, we systematically investigated the effect of the nitrogen partial pressure on composition, deposition efficiency, microstructure, macroparticles (MPs), hardness and adhesion strength of the AlTiN films. The results showed that with increasing the nitrogen partial pressure, the deposition rate exhibited a maximum at 1.2 Pa. Results of X-ray photoelectron spectroscopy (XPS) analysis revealed that AlTiN films were comprised of Ti-N and Al-N bonds. XRD results showed that the films exhibited a (111) preferred growth, and AlTi_3N and TiAl_x phases were observed in the film deposited at 1.7 Pa. Analysis of MPs statistics showed MPs decreased with the increase in the nitrogen partial pressure. In addition, the film deposited at 1.2 Pa possessed the maximum hardness of 38 GPa and the better adhesion strength.
机译：使用电弧离子镀（AIP）技术沉积具有不同氮分压的AlTiN膜。在这项研究中，我们系统地研究了氮分压对AlTiN膜的组成，沉积效率，微观结构，大颗粒（MPs），硬度和粘附强度的影响。结果表明，随着氮分压的增加，沉积速率在1.2 Pa时达到最大值。X射线光电子能谱（XPS）分析的结果表明AlTiN薄膜由Ti-N和Al-N键组成。 XRD结果表明，该膜表现出（111）的优先生长，在1.7 Pa的沉积膜中观察到AlTi_3N和TiAl_x相。MPs统计分析表明MPs随着氮分压的增加而降低。另外，以1.2Pa沉积的膜具有38GPa的最大硬度和更好的粘合强度。

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  • 来源
    《Applied Surface Science》 |2011年第5期|p.1819-1825|共7页
  • 作者

    Fei Cai; Shihong Zhang; Jinlong Li; Zhong Chen; Mingxi Li; Lei Wang;

  • 作者单位

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    AlTiN film; macroparticles; nanoindentation; adhesion;

    机译：AlTiN膜;大颗粒纳米压痕附着力;

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