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首页> 外文期刊>Applied Surface Science >Structural and magnetic properties of NiZn ferrite films with high saturation magnetization deposited by magnetron sputtering
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Structural and magnetic properties of NiZn ferrite films with high saturation magnetization deposited by magnetron sputtering

机译：磁控溅射沉积高饱和磁化强度的NiZn铁氧体薄膜的结构和磁性

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摘要

NiZn ferrite films with well-defined spinel crystal structure were in situ fabricated by radio frequency magnetron sputtering at room temperature. The microstructures and static magnetic properties of the films' dependence on the partial pressure ratio of argon to oxygen gas were investigated. Scanning electron microscope images indicated that all the films consisted of particles nanocrystalline in nature and the sizes increase as the ratio increases in the range of 10-25 nm. A large saturation magnetization (237.2 emu/cm~3) and a minimum of coercivity (68 Oe) were obtained when the ferrite film was deposited in the ratio of 4:1. The complex permeability values (μ = μ'-iμ'') of the film were measured at frequency up to 5 GHz. It was shown that the film exhibited a large real part of permeability μ' of 18 and a very high resonance frequency f_r, of 1.2 GHz. The results suggested that the NiZn ferrite film as-deposited in the ratio of 4:1 may be promised as magnetic medium in the application of integrated circuits operating at microwave frequencies.
机译：在室温下通过射频磁控溅射原位制备尖晶石晶体结构清晰的镍锌铁氧体薄膜。研究了薄膜的微观结构和静磁性能与氩气与氧气分压比的关系。扫描电子显微镜图像表明，所有膜本质上都是由纳米晶体颗粒组成，并且随着比率在10-25nm范围内增加而尺寸增加。当以4：1的比例沉积铁氧体膜时，获得了大的饱和磁化强度（237.2 emu / cm〜3）和最小的矫顽力（68 Oe）。在高达5 GHz的频率下测量了薄膜的复磁导率值（μ=μ'-iμ''）。结果表明，该膜的磁导率μ'的大部分实部为18，共振频率f_r非常高，为1.2 GHz。结果表明，在微波频率下工作的集成电路应用中，以4：1的比例沉积的NiZn铁氧体膜有望作为磁性介质。

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  • 来源
    《Applied Surface Science》 |2010年第8期|2319-2322|共4页
  • 作者

    Dangwei Guo; Xiaolong Fan; Guozhi Chai; Changjun Jiang; Xiling Li; Desheng Xue;

  • 作者单位

    Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou 730000, PR China;

    Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou 730000, PR China;

    Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou 730000, PR China;

    Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou 730000, PR China;

    Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou 730000, PR China;

    Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou 730000, PR China;

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  • 正文语种 eng
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  • 关键词

    ferrite films; soft magnetic property; resonance frequency; deposited at room temperature;

    机译：铁氧体膜软磁性能共振频率在室温下沉积;

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