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Migration of CrSi_2 nanocrystals through nanopipes in the silicon cap

机译:CrSi_2纳米晶体通过硅帽中的纳米管迁移。

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摘要

CrSi_2 nanocrystals (NC~1) were grown by reactive deposition epitaxy of Cr at 550 ℃. After deposition the Cr is localized in about 20-30 nm dots on the Si surface. The NCs were covered by silicon cap grown by molecular beam epitaxy at 700 ℃. The redistribution of NCs in the silicon cap was investigated by transmission electron microscopy and atomic force microscopy. The NCs are partly localized at the deposition depth, and partly migrate near the surface. A new migration mechanism of the CrS_i2 NCs is observed, they are transferred from the bulk toward the surface through nanopipes formed in the silicon cap. The redistribution of CrSi_2 NCs strongly depends on Cr deposition rate and on the cap growth temperature.
机译:通过在550℃下反应性沉积外延生长CrSi_2纳米晶体(NC〜1)。沉积后,Cr定位在Si表面约20-30 nm的点中。 NCs被分子束外延在700℃下生长的硅盖覆盖。通过透射电子显微镜和原子力显微镜研究了NCs在硅盖中的重新分布。 NCs部分位于沉积深度,部分迁移至表面附近。观察到了一种新的CrS_i2 NCs迁移机理,它们通过硅帽中形成的纳米管从整体向表面转移。 CrSi_2 NCs的重新分布在很大程度上取决于Cr的沉积速率和盖的生长温度。

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  • 来源
    《Applied Surface Science》 |2010年第23期|P.7331-7334|共4页
  • 作者单位

    Institute for Automation and Control Processes of Far Eastern Branch Russian Academy of Sciences, 690041 Vladivostok, Radio 5, Russia;

    rnResearch Institute for Technical Physics and Materials Science, Konkoly Thege 29-33, H-1525 Budapest, P.O. Box 49, Hungary;

    rnInstitute for Automation and Control Processes of Far Eastern Branch Russian Academy of Sciences, 690041 Vladivostok, Radio 5, Russia;

    rnResearch Institute for Technical Physics and Materials Science, Konkoly Thege 29-33, H-1525 Budapest, P.O. Box 49, Hungary;

    rnResearch Institute for Technical Physics and Materials Science, Konkoly Thege 29-33, H-1525 Budapest, P.O. Box 49, Hungary;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    chromium disilicide; quantum dots; diffusion of Cr in silicon; Si cap growth; defects in Si;

    机译:二硅化铬量子点;Cr在硅中的扩散;硅盖增长;硅中的缺陷;

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