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Controlling growth density and patterning of single crystalline silicon nanowires

机译:控制单晶硅纳米线的生长密度和图案化

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摘要

This study examines the usage of well-patterned Au nanoparticles (NPs) as a catalyst for one-dimensional growth of single crystalline Si nanowires (NWs) through the vapor-liquid-solid (VLS) mechanism. The study reports the fabrication of monolayer Au NPs through the self-assembly of Au NPs on a 3-aminopropyltrimethoxysilane (APTMS)-modified silicon substrate. Results indicate that the spin coating time of Au NPs plays a crucial role in determining the density of Au NPs on the surface of the silicon substrate and the later catalysis growth of Si NWs. The experiments in this study employed optical lithography to pattern Au NPs, treating them as a catalyst for Si NW growth. The patterned Si NW structures easily produced and controlled Si NW density. This approach may be useful for further studies on single crystalline Si NW-based nanodevices and their properties.
机译:这项研究研究了如何利用汽-液-固(VLS)机理,将结构良好的金纳米颗粒(NPs)用作单晶硅纳米线(NWs)一维生长的催化剂。这项研究报告了通过在3-氨丙基三甲氧基硅烷(APTMS)改性的硅基板上自组装Au NP来制造单层Au NP。结果表明,Au NPs的旋涂时间在确定硅基底表面上Au NPs的密度以及随后对Si NWs的催化生长中起着至关重要的作用。本研究中的实验采用光刻技术对金纳米颗粒进行构图,并将其作为生长硅纳米线的催化剂。图案化的Si NW结构易于产生并控制Si NW密度。该方法对于单晶基于硅纳米线的纳米器件及其性能的进一步研究可能是有用的。

著录项

  • 来源
    《Applied Surface Science》 |2010年第23期|P.7339-7343|共5页
  • 作者单位

    Department of Biomedical Engineering and Environmental Sciences, National Tsing Hua University, Hsinchu, 300, Taiwan Department of Radiation Oncology, Changhua Christian Hospital, Changhua, 500, Taiwan;

    rnDepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 300, Taiwan;

    rnDepartment of Applied Chemistry, National University of Kaohsiung, Kaohsiung, 811, Taiwan;

    rnDepartment of Biomedical Engineering and Environmental Sciences, National Tsing Hua University, Hsinchu, 300, Taiwan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanoparticles; nanowires; self-assembly;

    机译:纳米粒子纳米线;自组装;

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