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Improved electron emission characteristics of ZnO nano-gap with Pd films

机译：带有Pd膜的ZnO纳米间隙的改善的电子发射特性

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摘要

The properties of the surface-conduction electron-emitter display (SED) are mainly decided by the surface-conduction electron emitters (SCEs). Pd is mostly used to fabricate the surface-conduction electron emitters, which are normally obtained by generating a nano-scale gap from PdO conductive film. ZnO is a potential material for electron emission and the research work has proved that ZnO film can act as the electron-emitter material. In this study, we propose to use the ZnO-Pd two-layer film as the conductive film. Both the multi-layer device electrode film and conductive film were deposited by a magnetron sputter, and SCEs are formed by the electro-forming process as used in SED. The results revealed that the Pd film on ZnO film surface increases the electron emission efficiency from 0.36‰ to 3.85‰.
机译：表面传导电子发射器显示器（SED）的属性主要由表面传导电子发射器（SCE）决定。 Pd主要用于制造表面传导电子发射器，通常是通过从PdO导电膜产生纳米级间隙来获得的。 ZnO是潜在的电子发射材料，研究工作证明ZnO薄膜可以作为电子发射材料。在这项研究中，我们建议使用ZnO-Pd两层膜作为导电膜。多层器件电极膜和导电膜均通过磁控溅射沉积，并且通过SED中使用的电成型工艺形成SCE。结果表明，ZnO薄膜表面的Pd薄膜使电子发射效率从0.36‰提高到3.85‰。

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  • 来源
    《Applied Surface Science》 |2010年第23期|P.7323-7326|共4页
  • 作者

    Siliang Xiong; Zhongxiao Song; Shengli Wu; Lingguo Zhao; Yanhuai Li; Jintao Zhang;

  • 作者单位

    Key Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, No. 28 Xianning West Road, Xi'an 710049, Shaanxi, China;

    rnState Key Laboratory for Mechanical Behavior of Materials, Xi'anjiaotong University, Xi'an 710049, China;

    rnKey Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, No. 28 Xianning West Road, Xi'an 710049, Shaanxi, China;

    rnKey Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, No. 28 Xianning West Road, Xi'an 710049, Shaanxi, China;

    rnState Key Laboratory for Mechanical Behavior of Materials, Xi'anjiaotong University, Xi'an 710049, China;

    rnKey Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, No. 28 Xianning West Road, Xi'an 710049, Shaanxi, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    surface-conduction electron emission; nano-scale gap; multi-layer films;

    机译：表面传导电子发射纳米级间隙多层膜;

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