Influence of post-annealing on the properties of Sc-doped ZnO transparent conductive films deposited by radio-frequency sputtering

Xueqiang Liu; Weihong Bi; Zhaolun Liu

首页> 外文期刊>Applied Surface Science >Influence of post-annealing on the properties of Sc-doped ZnO transparent conductive films deposited by radio-frequency sputtering

【24h】

Influence of post-annealing on the properties of Sc-doped ZnO transparent conductive films deposited by radio-frequency sputtering

机译：后退火对射频溅射沉积掺杂Sc的ZnO透明导电膜性能的影响

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Sc-doped ZnO transparent conductive films are deposited on glass substrates by radio-frequency sputtering. The influence of post-annealing on the structural, morphologic, electrical, and optical properties of the films is investigated by energy dispersion X-ray spectroscopy, X-ray diffraction, Hall measurement, and optical transmission spectroscopy. The experimental results show that these films are polycrystalline with a preferred [001] orientation. The lowest resistivity of 2.6 × 10~4 Ω cm is obtained from the film annealed at 500 ℃. The average optical transmittance of the films is over 90%. These results suggest that Sc-doped ZnO is a good candidate for fabricating high performance transparent conductive films.

机译：通过射频溅射将掺Sc的ZnO透明导电膜沉积在玻璃基板上。通过能量色散X射线光谱，X射线衍射，霍尔测量和光学透射光谱研究了退火后对膜的结构，形态，电学和光学性质的影响。实验结果表明，这些薄膜是具有优选[001]取向的多晶。在500℃退火的薄膜的最低电阻率为2.6×10〜4Ωcm。薄膜的平均透光率超过90％。这些结果表明，掺Sc的ZnO是制备高性能透明导电膜的良好选择。

著录项

来源
《Applied Surface Science》 |2009年第18期|7942-7945|共4页
作者
Xueqiang Liu; Weihong Bi; Zhaolun Liu;
展开▼
作者单位

Department of Photoelectronic Engineering, College of Information Science and Engineering Yanshan University, Qinhuangdao 066004, China;

Department of Photoelectronic Engineering, College of Information Science and Engineering Yanshan University, Qinhuangdao 066004, China;

Department of Photoelectronic Engineering, College of Information Science and Engineering Yanshan University, Qinhuangdao 066004, China;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类
关键词
semiconductors; electrical properties; thin films; transparent conductive films; radio-frequency sputtering;

机译：半导体;电性能;薄膜;透明导电膜;射频溅射;

相似文献

外文文献
中文文献
专利

1. Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering [J] . Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, Materials . 2017,第8期

机译：射频，直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子传输和晶体学取向特征
2. Carrier mobility of highly transparent conductive Al-doped ZnO polycrystal line films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk [J] . Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto Journal of Applied Physics . 2015,第4期

机译：射频，直流和射频叠加直流磁控溅射沉积的高透明导电Al掺杂ZnO多晶线膜的载流子迁移率：晶界效应和晶粒体积中的散射
3. Effects of Substrate Temperature on Properties of Transparent Conductive Ta-Doped TiO2 Films Deposited by Radio-Frequency Magnetron Sputtering [J] . Yang Liu, Qian Peng, Zhong-Pin Zhou, 中国物理快报：英文版 . 2018,第004期

机译：基底温度对射频磁控溅射沉积钽掺杂透明导电TiO2薄膜性能的影响
4. Influence of Post-annealing Temperature on the Properties of Ti-Doped In_2O_3 Transparent Conductive Films by DC Ratio-frequency Sputtering [C] . Lei Li, Chen Chen, Chengjun Dong, MRS meeting . 2012

机译：退火温度对直流比率溅射对Ti掺杂in_2O_3透明导电膜性能的影响
5. Fabrication and characterization of the electrical and optical properties of n-type thin film transparent conducting oxides deposited by neutralized ion beam sputtering and pulsed laser deposition. [D] . Vanderford, John D. 2011

机译：通过中和离子束溅射和脉冲激光沉积沉积的n型薄膜透明导电氧化物的电学和光学性质的制备和表征。
6. Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency Direct-Current and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering [O] . Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, 2017

机译：射频直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子输运和晶体学取向特征
7. Effect of electron irradiation on transparent conductive films ZnO:Al deposited at different sputtering power [O] . Myroniuk D.V., Ievtushenko A.I., Lashkarev G.V., 2015

机译：电子辐照对不同溅射功率下沉积的ZnO：Al透明导电膜的影响

Influence of post-annealing on the properties of Sc-doped ZnO transparent conductive films deposited by radio-frequency sputtering

摘要

著录项

相似文献

相关主题

期刊订阅