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首页> 外文期刊>Applied Surface Science >Oxygen Flux Influence On The Morphological, Structural And Optical Properties Of Zn_(1-x)mg_xo Thin Films Grown By Plasma-assisted Molecular Beam Epitaxy
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Oxygen Flux Influence On The Morphological, Structural And Optical Properties Of Zn_(1-x)mg_xo Thin Films Grown By Plasma-assisted Molecular Beam Epitaxy

机译：氧通量对等离子体辅助分子束外延生长Zn_（1-x）mg_xo薄膜的形貌，结构和光学性质的影响

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The Zn_(1-x)Mg_xO thin films were grown on Al_2O_3substrate with various O_2 flow rates by plasma-assisted molecular beam epitaxy (P-MBE). The growth conditions were optimized by the characterizations of morphology, structural and optical properties. The Mg content of the Zn_(1-x)Mg_xO thin film increases monotonously with decreasing the oxygen flux. X-ray diffractometer (XRD) measurements show that all the thin films are preferred (002) orientated. By transmittance and absorption measurements, it was found that the band gap of the film decreases gradually with increasing oxygen flow rate. The surface morphology dependent on the oxygen flow rate was also studied by field emission scanning electron microscopy (FE-SEM). The surface roughness became significant with increasing oxygen flow rate, and the nanostructures were formed at the larger flow rate. The relationship between the morphology and the oxygen flow rate of Zn_(1-x)Mg_xO films was discussed.
机译：Zn_（1-x）Mg_xO薄膜通过等离子体辅助分子束外延（P-MBE）在具有不同O_2流速的Al_2O_3衬底上生长。通过形态，结构和光学性质的表征优化了生长条件。 Zn_（1-x）Mg_xO薄膜的Mg含量随着氧通量的减少而单调增加。 X射线衍射仪（XRD）的测量结果表明，所有薄膜均优选（002）取向。通过透射率和吸收率测量，发现膜的带隙随着氧气流速的增加而逐渐减小。还通过场发射扫描电子显微镜（FE-SEM）研究了取决于氧气流速的表面形态。随着氧气流量的增加，表面粗糙度变得明显，并且在更大的流量下形成了纳米结构。讨论了Zn_（1-x）Mg_xO薄膜的形貌与氧气流量的关系。

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