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首页> 外文期刊>Applied Surface Science >Structural and tribological properties of CrTiAIN coatings on Mg alloy by closed-field unbalanced magnetron sputtering ion plating
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Structural and tribological properties of CrTiAIN coatings on Mg alloy by closed-field unbalanced magnetron sputtering ion plating

机译：封闭场不平衡磁控溅射离子镀镁合金表面CrTiAIN涂层的结构和摩擦学性能

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摘要

In this paper, a series of multi-layer hard coating system of CrTiAIN has been prepared by closed-field unbalanced magnetron sputtering ion plating (CFUBMSIP) technique in a gas mixture of Ar + N_2. The coatings were deposited onto AZ31 Mg alloy substrates. During deposition step, technological temperature and metallic atom concentration of coatings were controlled by adjusting the currents of different metal magnetron targets. The nitrogen level was varied by using the feedback control of plasma optical emission monitor (OEM). The structural, mechanical and tribological properties of coatings were characterized by means of X-ray photoelectron spectrometry, high-resolution transmission electron microscope, field emission scanning electron microscope (FESEM), micro-hardness tester, and scratch and ball-on-disc tester. The experimental results show that the N atomic concentration increases and the oxide on the top of coatings decreases; furthermore the modulation period and the friction coefficient decrease with the N_2 level increasing. The outstanding mechanical property can be acquired at medium N_2 level, and the CrTiAIN coatings on AZ31 Mg alloy substrates outperform the uncoated M42 high speed steel (HSS) and the uncoated 316 stainless steel (SS).
机译：本文采用封闭场不平衡磁控溅射离子镀（CFUBMSIP）技术在Ar + N_2混合气体中制备了一系列CrTiAIN多层硬质涂层系统。将涂层沉积到AZ31 Mg合金基底上。在沉积步骤中，通过调节不同金属磁控管靶的电流来控制涂层的工艺温度和金属原子浓度。通过使用等离子发射光谱仪（OEM）的反馈控制来改变氮含量。通过X射线光电子能谱，高分辨率透射电子显微镜，场发射扫描电子显微镜（FESEM），显微硬度测试仪，划痕和圆盘测试仪对涂层的结构，力学和摩擦学性能进行了表征。 。实验结果表明，氮原子浓度增加，涂层顶部的氧化物减少；随着N_2水平的增加，调制周期和摩擦系数减小。在中等N_2水平下可以获得出色的机械性能，并且AZ31 Mg合金基底上的CrTiAIN涂层的性能优于未涂层的M42高速钢（HSS）和未涂层的316不锈钢（SS）。

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