Hydrogen plasma enhanced alignment on CNT-STM tips grown by liquid catalyst-assisted microwave plasma-enhanced chemical vapor deposition

Fa-Kuei Tung; Masamichi Yoshimura; Kazuyuki Ueda; Yutaka Ohira; Takayoshi Tanji

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Hydrogen plasma enhanced alignment on CNT-STM tips grown by liquid catalyst-assisted microwave plasma-enhanced chemical vapor deposition

机译：氢等离子体增强了通过液相催化剂辅助微波等离子体增强化学气相沉积法生长的CNT-STM探针的排列

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Carbon nanotubes are grown directly on a scanning tunneling microscopy tip by liquid catalyst-assisted microwave-enhanced chemical vapor deposition, and effects of hydrogen plasma treatment on the tip have been investigated in detail by field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM) and Raman spectroscopy. The unaligned CNTs on the as-grown tip apex have been realigned and reshaped by subsequent hydrogen plasma treatment. The diameter of CNTs is enlarged mainly due to amorphous layers being re-sputtered over their outer shells.

机译：碳纳米管通过液体催化剂辅助的微波增强化学气相沉积直接在扫描隧道显微镜尖端上生长，并且通过场发射扫描电子显微镜（FESEM），透射电子详细研究了氢等离子体处理对尖端的影响显微镜（TEM）和拉曼光谱。通过后续的氢等离子体处理，已生长的尖端顶点上未排列的CNTs已重新排列并重新塑形。 CNT的直径增大主要是由于非晶层被重新溅射在其外壳上。

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来源
《Applied Surface Science》 |2008年第23期|p.7750-7754|共5页
作者
Fa-Kuei Tung; Masamichi Yoshimura; Kazuyuki Ueda; Yutaka Ohira; Takayoshi Tanji;
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作者单位

Nano High-Tech Research Center, Toyota Technological Institute, 2-12-1 Hisakata, Tempaku-ku, Nagoya 468-8511, Japan;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
hydrogen plasma; CNT; alignment; SPM; CVD;

机译：氢等离子体;CNT;对准;SPM;CVD;

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专利

1. Direct Fabrication of Carbon Nanotubes STM Tips by Liquid Catalyst-Assisted Microwave Plasma-Enhanced Chemical Vapor Deposition [J] . Fa-KueiTung, MasamichiYoshimura, KazuyukiUeda Journal of nanomaterials . 2009,第1期

机译：液态催化剂辅助微波等离子体增强化学气相沉积法直接制备碳纳米管STM吸头
2. Direct Fabrication of Carbon Nanotubes STM Tips by Liquid Catalyst-Assisted Microwave Plasma-Enhanced Chemical Vapor Deposition [J] . Fa-Kuei Tung, Masamichi Yoshimura, Kazuyuki Ueda Journal of nanomaterials . 2009,第DRN期

机译：通过液体催化剂辅助微波等离子体增强的化学气相沉积直接制造碳纳米管STM尖端
3. Alignment of amorphous carbon nanotubes with graphitized branches grown by radio frequency plasma-enhanced chemical vapor deposition [J] . J.W. Liu, X. Wang, W.T. Zheng Carbon: An International Journal Sponsored by the American Carbon Society . 2007,第3期

机译：非晶碳纳米管与射频等离子体增强化学气相沉积法生长的石墨化分支的对准
4. 6.2: Enhancement of Field-Emission Characteristics by Using Hydrogen-Free Diamond-Like Carbon Film Deposited by Plasma-Enhanced Chemical Vapor Deposition [C] . K. C. Park, J. H. Moon, J. Jang 1996 SID international symposium : Digest of technical papers . 1996

机译：6.2：通过使用等离子体化学气相沉积沉积的无氢类金刚石碳膜来增强场发射特性
5. Strontium titanium oxide and barium(1-x) strontium(x) titanium oxide epitaxial thin films grown by plasma-enhanced metalorganic chemical vapor deposition. [D] . Liang, Shaohua. 1995

机译：通过等离子体增强的金属有机化学气相沉积法制得的锶钛氧化物和钡（1-x）锶钛氧化物外延薄膜。
6. Growth of Multiorientated Polycrystalline MoS2 Using Plasma-Enhanced Chemical Vapor Deposition for Efficient Hydrogen Evolution Reactions [O] . Na Liu, Jeonghun Kim, Jeonghyeon Oh, 2020

机译：多过多层多晶MOS2使用等离子体增强的化学气相沉积的生长以获得有效的氢气进化反应
7. Analysis of photoluminescence background of Raman spectra of carbon nanotips grown by plasma-enhanced chemical vapor deposition [O] . Wang B.B., Ostrikov K., Tsakadze Z.L., 2009

机译：等离子体增强化学气相沉积法生长碳纳米尖端的拉曼光谱的光致发光背景分析

Hydrogen plasma enhanced alignment on CNT-STM tips grown by liquid catalyst-assisted microwave plasma-enhanced chemical vapor deposition

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