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首页> 外文期刊>Applied Surface Science >Comparison Of Secondary Ion Intensity Enhancement From Polymers On Silicon And Silver Substrates By Using Au-tof-sims
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Comparison Of Secondary Ion Intensity Enhancement From Polymers On Silicon And Silver Substrates By Using Au-tof-sims

机译：使用Au-tof-sims比较聚合物在硅和银基底上的二次离子强度增强

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The usefulness of the usage of cluster primary ion source together with an Ag substrate and detection of Ag cationized molecular ions was studied from the standpoint to realize high sensitivity TOF-SIMS analysis of organic materials. Although secondary ions from polymer thin films on a Si substrate can be detected in a higher sensitivity with Au_3~+ cluster primary ion compared with Ga~+ ion bombardment, it was clearly observed that the secondary ion intensities from samples on an Ag substrate showed quite a different tendency from that on Si. When monoatomic primary ions, e.g., Au~+ and Ga~+, were used for the measurement of the sample on an Ag substrate, [M+Ag]~+ ions (M corresponds to polyethylene glycol molecule) were detected in a high sensitivity. On the contrary, when Au_3~+ was used, no intensity enhancement of [M+Ag]~+ ions was observed. The acceleration energy dependence of the detected secondary ions implies the different ionization mechanisms on the different substrates.
机译：从实现有机材料的高灵敏度TOF-SIMS分析的角度出发，研究了将团簇主离子源与Ag底物一起使用以及检测Ag阳离子化的分子离子的有用性。尽管与Ga〜+离子轰击相比，Au_3〜+团簇主离子可以更敏感地检测到Si衬底上的聚合物薄膜中的二次离子，但是可以清楚地观察到，Ag衬底上样品的二次离子强度显示出相当高的灵敏度。与Si上的趋势不同。当使用单原子一次离子（例如Au〜+和Ga〜+）测量Ag基质上的样品时，以高灵敏度检测到[M + Ag]〜+离子（M对应于聚乙二醇分子） 。相反，当使用Au_3〜+时，没有观察到[M + Ag]〜+离子的强度增强。检测到的次级离子对加速能量的依赖性意味着在不同基板上的不同电离机理。

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