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首页> 外文期刊>Applied Surface Science >Application Of Resonant Laser Postionization Snms For Quantitative Depth Profiling In Stainless Steel With Oxide Film
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Application Of Resonant Laser Postionization Snms For Quantitative Depth Profiling In Stainless Steel With Oxide Film

机译：共振激光正离子化SNS在氧化膜不锈钢定量深度分析中的应用

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A resonance laser postionization secondary neutral mass spectroscopy (SNMS) system with a quadrupole mass spectrometer has been developed to investigate its fundamental process for quantitative analysis of metal alloys and compounds. The feature of our SNMS system is to bombard ions with low energy incidence. The energy dependence of Cr/Fe ratios and resonant enhanced multi-photon ionization spectra of Fe in three kinds of samples have been observed. These results indicate that the existence of oxygen may disturb the quantitative measurement due to the population change of a sputtered atom though oxygen irradiation could prevent selective sputtering and ion enhanced sub-surface redistribution in stainless steel. The measured depth profiles of Cr, Fe and Ni in the colored stainless steel have been in agreement with the reference values within a factor of about 2.
机译：已经开发了具有四极质谱仪的共振激光后离子化次级中性质谱（SNMS）系统，以研究其定量分析金属合金和化合物的基本过程。我们的SNMS系统的功能是轰击低能量入射的离子。观察到三种样品中Cr / Fe比的能量依赖性和Fe的共振增强多光子电离光谱。这些结果表明，尽管氧辐照可以防止不锈钢中的选择性溅射和离子增强的亚表面再分布，但由于溅射原子的数量变化，氧的存在可能会干扰定量测量。在有色不锈钢中测得的Cr，Fe和Ni的深度分布与参考值相差约2倍。

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