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首页> 外文期刊>Applied Surface Science >Mechanics of plasma exposed spin-on-glass (SOG) and polydimethyl siloxane (PDMS) surfaces and their impact on bond strength
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Mechanics of plasma exposed spin-on-glass (SOG) and polydimethyl siloxane (PDMS) surfaces and their impact on bond strength

机译：等离子体暴露的旋涂玻璃（SOG）和聚二甲基硅氧烷（PDMS）表面的力学及其对粘合强度的影响

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摘要

Silicone polymer (PDMS), widely used for micro-fluidic and biosensor applications, possesses an extremely dynamic surface after it is subjected to an oxygen plasma treatment process. The surface becomes extremely hydrophilic immediately after oxygen plasma exposure by developing silanol bond (Si-OH), which promotes its adhesion to some other surfaces like, silicon, silicon dioxide, glass, etc. Such a surface, if left in ambient dry air, shows a gradual recovery of hydrophobicity. We have found an identical behavior to occur to surfaces coated with a thin continuous film of SOG (methyl silsesquioxane). The chemistry induced by oxygen plasma treatment of a spin-on-glass (SOG) coated surface provides a much higher density of surface silanol groups in comparison to precleaned glass, silicon or silicon dioxide substrates thus providing a higher bond strength with polydimethyl siloxane (PDMS). The bonding protocol developed by using the spin coated and cured SOG intermediate layer provides an universal regime of multi level wafer bonding of PDMS to a variety of substrates. The paper describes a contact angle based estimation of bond strength for SOG and PDMS surfaces exposed to various combinations of plasma parameters. We have found that the highest bond strength condition is achieved if the contact angle on the SOG surface is less than 10°.
机译：硅酮聚合物（PDMS）广泛用于微流体和生物传感器应用，经过氧等离子体处理后，具有极富动态的表面。氧等离子体暴露后，该表面立即通过形成硅烷醇键（Si-OH）变得极为亲水，从而促进其与某些其他表面的粘附，例如硅，二氧化硅，玻璃等。如果留在环境干燥的空气中，显示疏水性逐渐恢复。我们发现，涂有连续薄SOG（甲基倍半硅氧烷）薄膜的表面会发生相同的行为。与预清洗的玻璃，硅或二氧化硅基材相比，通过旋涂玻璃（SOG）涂层表面的氧等离子体处理所诱导的化学作用提供了更高的表面硅烷醇基团密度，因此提供了与聚二甲基硅氧烷（PDMS）更高的结合强度）。通过使用旋涂和固化的SOG中间层开发的键合协议为PDMS的多种晶圆键合到各种基板提供了一种通用方案。该论文描述了基于接触角的SOG和PDMS表面暴露于各种等离子体参数组合时的结合强度估算。我们发现，如果SOG表面的接触角小于10°，则可以达到最高的粘结强度条件。

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