Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

T.H.R. Crawford; H.K. Haugen

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Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

机译：飞秒激光脉冲在1300和2100 nm波长下照射的硅上的亚波长表面结构

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摘要

We present periodic ripples and arrays of protrusions formed on the surface of silicon after irradiation by low-fluence linearly polarized femtosecond laser pulses. Laser-induced periodic surface structures (LIPSS) are observed for irradiation at center wavelengths of 800, ～ 1300, and ～ 2100 nm, with the structure periods somewhat less than the incident wavelengths in air. Additionally, we observe structures with spatial periods substantially less than the incident laser wavelengths. These sub-wavelength periodic structures form only when the photon energy is less than the silicon bandgap energy. We discuss a number of factors which may contribute to the generation of this surface morphology.

机译：我们介绍了低通量线性极化飞秒激光脉冲辐照后在硅表面形成的周期性波纹和突起阵列。观察到激光诱导的周期性表面结构（LIPSS）在中心波长为800，〜1300和〜2100 nm处进行辐照，其结构周期略小于空气中的入射波长。此外，我们观察到的空间周期基本上小于入射激光波长的结构。仅当光子能量小于硅带隙能量时，才形成这些亚波长周期结构。我们讨论了许多可能有助于这种表面形态生成的因素。

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来源
《Applied Surface Science》 |2007年第11期|4970-4977|共8页
作者
T.H.R. Crawford; H.K. Haugen;
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作者单位

Department of Engineering Physics, McMaster University, Hamilton, Ontario, Canada L8S 4L7;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
femtosecond pulsed laser; silicon; surface morphology; sub-wavelength period;

机译：飞秒脉冲激光硅;表面形态亚波长周期;

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1. Sub-wavelength surface structuring of NiTi alloy by femtosecond laser pulses [J] . Yang Yang, Jianjun Yang, Chunyong Liang, Applied Physics A: Materials Science & Processing . 2008,第3期

机译：飞秒激光脉冲在NiTi合金的亚波长表面结构化
2. Sub-wavelength Uniform Periodic Surface Structures Induced by Low Femtosecond Laser Fluence on Silicon with Optical Glass Covering [J] . Chao Dong, NingYi Yuan, JianhuaQiu, Journal of Laser Micro/Nanoengineering . 2015,第2期

机译：低飞秒激光注量在光学玻璃覆盖的硅上产生的亚波长均匀周期表面结构
3. Direct writing of continuous and discontinuous sub-wavelength periodic surface structures on single-crystalline silicon using femtosecond laser [J] . Rajamudili Kuladeep, Chakradhar Sahoo, Desai Narayana Rao Applied Physics Letters . 2014,第22期

机译：飞秒激光在单晶硅上直接写入连续和不连续的亚波长周期表面结构
4. Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses [C] . T. H. R. Crawford, A. Borowiec, H. K. Haugen, Conference on Lasers and Electro-Optics . 2004

机译：由飞秒激光脉冲照射的硅上的子波长表面结构
5. Femtosecond laser irradiation induced infrared absorption on silicon surfaces [D] . Zhu, Qinghua. 2015

机译：飞秒激光辐照引起硅表面的红外吸收
6. Characterization of MHz pulse repetition rate femtosecond laser-irradiated gold-coated silicon surfaces [O] . Manickam Sivakumar, Krishnan Venkatakrishnan, Bo Tan 2011

机译：MHz脉冲重复频率飞秒激光辐照的镀金硅表面的表征
7. Convection roll-driven generation of supra-wavelength periodic surface structures on dielectrics upon irradiation with femtosecond pulsed lasers [O] . Tsibidis, George D., Skoulas, Evangelos, Papadopoulos, Antonis, 2016

机译：对流辊驱动产生超波长周期表面用飞秒脉冲激光照射电介质上的结构

Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

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