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Ar~+ irradiation of Si nanocrystal-doped SiO_2: Evolution of photoluminescence

机译:纳米Si掺杂SiO_2的Ar〜+辐照:光致发光的演化

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We report the evolution of photoluminescence (PL) of Si nanocrystals (nc-Si) embedded in a matrix of SiO_2 during Ar~+ ion bombardment. The integrated intensity of nc-Si PL falls down drastically before the Ar~+ ion fluence of 10~(15) ions cm~(-2), and then decreases slowly with the increasing ion fluence. At the meantime, the PL peak position blueshifts steadily before the fluence of 10~(15) ions cm~(-2), and then changes in an oscillatory manner. Also it is found that the nc-Si PL of the Ar~+-irradiated sample can be partly recovered after annealing at 800℃ in nitrogen, but can be almost totally recovered after annealing in oxygen. The results confirm that the ion irradiation-induced defects are made up of oxygen vacancies, which absorb light strongly. The oscillatory peak shift of nc-Si can be related to a size-distance distribution of nc-Si in SiO_2.
机译:我们报道了在Ar〜+离子轰击过程中,嵌入SiO_2基质的Si纳米晶体(nc-Si)的光致发光(PL)的演变。 nc-Si PL的积分强度在10〜(15)离子cm〜(-2)的Ar〜+离子通量之前急剧下降,然后随着离子通量的增加而缓慢下降。同时,PL峰位置在10〜(15)个离子cm〜(-2)的能量通量之前稳定地蓝移,然后发生振荡变化。还发现,在氩气中800℃退火后,部分被Ar〜+辐照的样品的nc-Si PL可以部分回收,而在氧气中退火后,可以几乎全部回收。结果证实,离子辐照引起的缺陷由氧空位组成,氧空位强烈吸收光。 nc-Si的振荡峰移可能与SiO_2中nc-Si的尺寸-距离分布有关。

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