• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied Surface Science >Intrinsic mechanical properties of ultra-thin amorphous carbon layers
【24h】

Intrinsic mechanical properties of ultra-thin amorphous carbon layers

机译：超薄非晶碳层的内在力学性能

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this work, we extracted the film's hardness (H_F) of ultra-thin diamond-like carbon layers by simultaneously taking into account the tip blunting and the substrate effect. As compared to previous approaches, which did not consider tip blunting, this resulted in marked differences (30-100%) for the H_F value of the thinner carbon coatings. We find that the nature of the substrate influences this intrinsic film parameter and hence the growth mechanisms. Moreover, the H_F values generally increase with film thickness. The 10 nm and 50 nm thick hydrogenated amorphous carbon (a-C:H) films deposited onto Si have H_F values of, respectively, ～26 GPa and ～31 GPa whereas the 10 nm and 50 nm thick tetrahedral amorphous carbon (t-aC) films deposited onto Si have H_F values of, respectively, ～29 GPa and ～38 GPa. Both the a-C:H and t-aC materials also show higher density and refractive index values for the thicker coatings, as measured, respectively by X-ray reflectometry and optical profilometry analysis. However, the Raman analysis of the a-C:H samples show bonding characteristics which are independent of the film thickness. This indicates that in these ultra-thin hydrogenated carbon films, the arrangement of sp~2 clusters does not relate directly to the hardness of the film.
机译：在这项工作中，我们同时考虑了尖端钝化和基底效应，从而提取了超薄类金刚石碳层的膜硬度（H_F）。与不考虑尖端钝化的先前方法相比，这导致了较薄的碳涂层的H_F值存在显着差异（30-100％）。我们发现衬底的性质影响该固有膜参数，并因此影响生长机理。而且，H_F值通常随着膜厚度而增加。沉积在Si上的10 nm和50 nm厚的氢化非晶碳（aC：H）膜的H_F值分别为〜26 GPa和〜31 GPa，而10 nm和50 nm厚的四面体非晶碳（t-aC）膜沉积在Si上的H_F值分别为〜29 GPa和〜38 GPa。对于A-C：H和t-aC材料，对于较厚的涂层，也分别显示出更高的密度和折射率值，分别通过X射线反射测定法和光学轮廓测定法进行测量。但是，a-C：H样品的拉曼分析显示出与膜厚无关的键合特性。这表明在这些超薄氢化碳膜中，sp〜2簇的排列与膜的硬度没有直接关系。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号