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Mechanical properties of Mo-Ru thin films with Ni interlayer of different thickness

机译：厚度不同的Ni夹层Mo-Ru薄膜的力学性能

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Noble metal coatings are usually introduced to increase lifetime of glass molding die. In this study, Mo-Ru coatings with Ni interlayer were deposited on tungsten carbide by DC sputtering processes at an elevated temperature of 550℃ to modify the properties in molding die materials. Phase identification was investigated by X-ray diffractometry (XRD). The surface morphology and composition of coatings were evaluated by atomic force microscopy (AFM) and field-emission electron probe microanalyzer (FE-EPMA), respectively. Hardness of the Mo-Ru films was measured by nanoindentation testing. In the aspects of adhesion, the influence on interlayer of different thickness was probed by the scratch test, and the different composition of Mo-Ru resulted in various kinds of fracture configurations. The scratch test exhibited spalling and chipping failure between substrate and layer.
机译：通常引入贵金属涂层以增加玻璃成型模具的寿命。在这项研究中，具有Ni中间层的Mo-Ru涂层在550℃的高温下通过DC溅射工艺沉积在碳化钨上，以改变成型模具材料的性能。通过X射线衍射法（XRD）研究了相鉴定。分别通过原子力显微镜（AFM）和场发射电子探针显微分析仪（FE-EPMA）评估涂层的表面形态和组成。通过纳米压痕测试测量了Mo-Ru膜的硬度。在附着力方面，通过刮擦试验探究了对不同厚度的夹层的影响，不同组成的Mo-Ru导致了各种断裂形态。划痕测试显示出基材和层之间的剥落和碎裂失败。

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