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Laser ablation of metals by femtosecond pulses: Theoretical and experimental study

机译：飞秒脉冲激光烧蚀金属的理论与实验研究

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摘要

We have investigated ultrashort laser micromachining of metals, both from the point of view of the basic physical processes, and the technological implications. The process of hole drilling of Ni with ≈300 fs SHG (λ = 527 nm) Nd-glass and Al samples with 100 fs Ti:sapphire (λ = 800 nm) laser pulses, respectively, has been experimentally addressed by using time-gated optical emission spectroscopy of the ablated material and SEM analysis of the targets. The ablation process has also been analyzed by classical, molecular dynamics (MD) simulations, by using a Morse potential to describe the interaction between the atoms, and taking into account the electron heat diffusion contribution. The dependence of the ablation depth on laser fluence, as measured by SEM analysis, is in good agreement with the numerical simulations and is also well correlated with the optical emission yield of the expanding plume.
机译：我们已经从基本物理过程和技术意义的角度研究了金属的超短激光微加工。使用时间选通通过实验解决了分别用约300 fs SHG（λ= 527 nm）Nd玻璃和100 fs Ti：蓝宝石（λ= 800 nm）激光脉冲的Al样品对Ni进行钻孔的过程烧蚀材料的光学发射光谱和目标的SEM分析。还通过经典的分子动力学（MD）模拟对消融过程进行了分析，方法是使用莫尔斯电势来描述原子之间的相互作用，并考虑到电子的热扩散作用。通过SEM分析测量，烧蚀深度对激光能量密度的依赖性与数值模拟非常吻合，并且与膨胀羽流的光发射率也具有很好的相关性。

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