A new film analysis method using polycapillary X-ray lens

Jun Yang; Xunliang Ding; Changlin Liang

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A new film analysis method using polycapillary X-ray lens

机译：一种使用多毛细管X射线透镜的薄膜分析新方法

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摘要

Grazing emission X-ray fluorescence (GE-XRF) is a development of XRF related to total reflection XRF. This paper proposed a GE-MXRF setup involved a polycapillary X-ray lens. Polycapillary lens is an effective optics to obtain μm-size primary X-ray beam. Using this proposed setup, we applied it to the analysis of film samples, and the information of film thickness, composition and density can be acquired, which is very useful in semiconductor industry.

机译：放牧发射X射线荧光（GE-XRF）是与全反射XRF相关的XRF的发展。本文提出了一种涉及多毛细管X射线透镜的GE-MXRF装置。多毛细管透镜是获得微米级初级X射线束的有效光学器件。使用此建议的设置，我们将其应用于薄膜样品的分析，并且可以获得薄膜厚度，组成和密度的信息，这在半导体工业中非常有用。

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来源
《Applied Surface Science》 |2007年第20期|8352-8355|共4页
作者
Jun Yang; Xunliang Ding; Changlin Liang;
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作者单位

Institute of Low Energy Nuclear Physics, Beijing Radiation Center, Beijing Normal University, Beijing 100875, PR China;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
grazing exit micro X-ray fluorescence; polycapillary X-ray lens; film;

机译：放牧出口微X射线荧光;多毛细管X射线透镜;电影;

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1. Effective X-ray beam size measurements of an X-ray tube and polycapillary X-ray lens system using a scanning X-ray fluorescence method [J] . Mihai R. Gherase, Andres Felipe Vargas Nuclear Instruments & Methods in Physics Research . 2017,第mara15期

机译：使用扫描X射线荧光法有效测量X射线管和多毛细管X射线透镜系统的X射线束大小
2. A micro X-ray fluorescence analysis method using polycapillary X-ray optics and grazing exit geometry [J] . Jun Yang, Kouichi Tsuji, Xiaoyan Lin, Thin Solid Films . 2009,第11期

机译：使用多毛细管X射线光学器件和掠射出口几何形状的微X射线荧光分析方法
3. Theoretical Simulation of X-Ray Transmission Through a Polycapillary X-Ray Lens With a Variable Capillary Radius [J] . Wang Xingyi, Li Yude, Zhou Mo, IEEE Transactions on Nuclear Science . 2020,第5期

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4. Simulation of X-Ray transmitted in the square polycapillary X-ray lens [C] . Shiqi Peng, Zhiguo Liu, Tianxi Sun, Photoelectronic technology committee conferences . 2016

机译：方形多毛细管X射线透镜中透射X射线的模拟
5. Relative X-ray line intensities and their application to a single standard procedure for quantitative X-ray microanalysis of bulk samples and thin films. [D] . Hatzistergos, Michael S. 2007

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6. Evaluation of Three Pneumothorax Size Quantification Methods on Digitized Chest X-ray Films Using Medical-Grade Grayscale and Consumer-Grade Color Displays [O] . Antonio J. Salazar, Diego A. Aguirre, Juliana Ocampo, 2014

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7. X-ray Energy Dependence of the Properties of the Focused Beams Produced by Polycapillary X-ray Lens [O] . Akinori MATSUDA, Yuta NODERA, Kazuhiko NAKANO, 2008

机译：多谱X射线镜片产生的聚焦光束的性质的X射线能量依赖性

A new film analysis method using polycapillary X-ray lens

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