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The Approach To Diamond Growth On Levitating Seed Particles

机译:悬浮粒子生长钻石的方法

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We demonstrate the approach of diamond growth on levitating seed particles in a rf plasma. We introduce a hot filament chemical vapor deposition (CVD) technique into the rf plasma chamber in order to obtain improved crystal growth. Firstly, we confirmed diamond nucleation on seed particles placed on a Si substrate using the hot filament CVD. The deposition conditions, namely the total pressure and the rf power, were chosen so that they correspond to particles levitation conditions. We observe that a hydrogen pre-treatment on the seed particles improves the nucleation. Secondly, we confirm the levitation of particles at high temperatures. Fine particles levitated in a plasma are particularly sensitive to thermophoretic effects due to inhomogeneities in the gas heating. Therefore, proper heating procedures are required for successful particles levitation.
机译:我们展示了在射频等离子体中悬浮种子颗粒上钻石生长的方法。我们将热丝化学气相沉积(CVD)技术引入到射频等离子体室中,以获得改善的晶体生长。首先,我们使用热灯丝CVD确认了放置在Si衬底上的种子颗粒上的金刚石成核作用。选择沉积条件,即总压力和rf功率,使其对应于颗粒悬浮条件。我们观察到,对种子颗粒进行氢预处理可改善成核作用。其次,我们确定了高温下颗粒的悬浮。由于气体加热中的不均匀性,悬浮在等离子体中的细颗粒对热泳效应特别敏感。因此,成功的悬浮悬浮液需要适当的加热程序。

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