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Advance In Next Century Nanocmosfet Research

机译:下一世纪纳米技术的研究进展

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It is well known that Taiwan's IC industry is in the very leading front of the world, and production of 65 nm devices was launched in 2006. Within a few years, the need of high-k dielectrics and metal gates is eminent and truly indispensable. Professor H.L. Hwang (the author) organized 12 professors and 50 graduate students of National Tsing Hua University and Chiao Tung University, and executed this particular project, which is sponsored by the Ministry of Economic Affairs of Republic of China, and is aimed at treating efficiently this problem and transferred the critical technologies to industry in a time frame of 3 years.
机译:众所周知,台湾的集成电路产业处于世界领先地位,并于2006年开始生产65 nm器件。几年之内,对高k电介质和金属栅极的需求已迫在眉睫,而且确实不可或缺。 HHL Hwang教授(作者)组织了国立清华大学和交通大学的12位教授和50名研究生,并执行了这项由中华民国经济部赞助的项目,旨在有效治疗这个问题,并在3年​​内将关键技术转移到了行业。

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