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Combinatorial arc plasma deposition search for Ru-based thin film metallic glass

机译:组合弧等离子体沉积研究Ru基薄膜金属玻璃

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We have discovered a novel Ru-based thin film metallic glass (TFMG) using combinatorial arc plasma deposition (CAPD). To search for Ru-based TFMG, alloy systems of Ru-Zr-Al, Ru-Zr-Fe and Ru-Zr-Mo were investigated by making libraries. Each library consisted of 1089 CAPD samples deposited on a substrate by CAPD. Composition of each sample is different with each other.rnThe composition and phases of the CAPD samples were measured by energy dispersive X-ray fluorescence spectrometry and X-ray diffractometry, respectively. Results showed the amorphous regions depended on the additive elements Al, Fe or Mo. Compared with the addition of Al, the addition of Fe or Mo exhibited high amorphous forming ability.rnTo evaluate the mechanical properties, the glass transition temperature T_g and the crystallization temperature T_x of the amorphous samples in each Ru-Zr-X alloy, larger samples having the same compositions as the typical amorphous CAPD samples were reproduced by sputtering because the CAPD samples were too small to measure the mechanical properties, T_g and T_x.rnRu_(65)Zr_(30)Al_5 and Ru_(67)Zr_(25) Al_8 samples were found to exhibit the better fracture stress and elastic limit than conventional TFMGs, while Ru-Zr-Fe and Ru-Zr-Mo samples were found to be brittle. DSC revealed that the Ru_(65)Zr_(30)Al_5 sample was a TFMG, with a T_g of 902 K and T_x of 973 K.
机译:我们发现了一种新的基于Ru的薄膜金属玻璃(TFMG),它使用组合电弧等离子体沉积(CAPD)。为了搜索Ru基的TFMG,通过制作库研究了Ru-Zr-Al,Ru-Zr-Fe和Ru-Zr-Mo的合金体系。每个文库由1089个通过CAPD沉积在基材上的CAPD样品组成。 CAPD样品的组成和相分别通过能量色散X射线荧光光谱法和X射线衍射法测量。结果表明,非晶区取决于添加元素Al,Fe或Mo。与添加Al相比,Fe或Mo表现出较高的非晶形成能力。rn为了评价力学性能,玻璃化转变温度T_g和结晶温度每种Ru-Zr-X合金中无定形样品的T_x,组成与典型无定形CAPD样品相同的较大样品,是通过溅射法复制的,因为CAPD样品太小,无法测量机械性能T_g和T_x.rnRu_(65 )Zr_(30)Al_5和Ru_(67)Zr_(25)Al_8样品比常规TFMG具有更好的断裂应力和弹性极限,而Ru-Zr-Fe和Ru-Zr-Mo样品则较脆。 DSC揭示Ru_(65)Zr_(30)Al_5样品是TFMG,T_g为902 K,T_x为973 K.

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