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Determination of the inelastic mean free paths (IMFPs) in Ti by elastic peak electron spectroscopy (EPES): Effect of impurities and surface excitations

机译:弹性峰电子光谱法(EPES)测定Ti中的非弹性平均自由程(IMFP):杂质和表面激发的影响

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摘要

Surface excitations are important in surface sensitive electron spectroscopes, especially in elastic peak electron spectroscopy (EPES) since they may distort quantitative information. This phenomenon is more pronounced at low electron energy and glancing emission angles and should be appropriately corrected. In the present work we investigate quantitatively the role of contaminations, density and surface excitations on electron inelastic mean free paths (IMFPs) in Ti determined by elastic peak electron spectroscopy (EPES) using Cu standard. In the Monte Carlo algorithm the new NIST 3.1 database of electron elastic scattering cross sections was applied. It has been also shown that accounting for surface excitations, as well as for appropriate input parameters (surface composition, density, hydrogen) in the EPES method, is important for accuracy of evaluated IMFPs. Due to high reactivity of Ti, the IMFPs for contaminated Ti may be of interest. The authors indicate the magnitude of various corrections on the IMFPs derived by EPES.
机译:表面激发在表面敏感电子光谱仪中尤其是在弹性峰电子光谱仪(EPES)中很重要,因为它们可能会使定量信息失真。这种现象在低电子能量和掠射角下更为明显,应适当纠正。在目前的工作中,我们定量研究了污染,密度和表面激发在Ti中电子非弹性平均自由程(IMFPs)上的作用,该方法通过使用Cu标样的弹性峰电子光谱法(EPES)确定。在蒙特卡洛算法中,应用了新的NIST 3.1电子弹性散射截面数据库。还显示出,在EPES方法中考虑表面激发以及适当的输入参数(表面成分,密度,氢),对于评估IMFP的准确性非常重要。由于Ti的高反应性,可能会对污染Ti的IMFP感兴趣。作者指出了EPES对IMFP进行的各种校正的幅度。

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