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首页> 外文期刊>Applied Surface Science >Fabrication of patterned gold electrodes with spin-coated-and-fired Au(111) film by the soft lithography
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Fabrication of patterned gold electrodes with spin-coated-and-fired Au(111) film by the soft lithography

机译：通过软光刻法制备具有旋涂并烧结的Au（111）膜的图案化金电极

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We prepared high quality Au(111) film on Si wafer through the spin coating and thermal decomposition of a gold ink, spin-coated-and-fired (SCAF) An film. The X-ray measurements, XRD and pole-figure analysis, showed that the SCAF Au film has a (111) out-of-plane orientation with a random in-plane orientation. In order to confirm the chemical activity of the SCAF An film, we demonstrate the formation of patterned structures with the film by using soft lithography technique. The chemical activities of this physically stable SCAF Au film to the alkanethiols were at least equivalent those of physically deposited the An films. The possibility of the mass production of micro patterned structure with the SCAF Au film was also demonstrated over the wide region on Si wafer by the microcontact lithography. These suggest that the Au film will help the easy fabrication of various nanosized devices on Si wafer and other substrates. (c) 2005 Elsevier B.V. All rights reserved.
机译：我们通过旋涂和金墨的热分解，旋涂并焙烧（SCAF）膜在硅片上制备了高质量的Au（111）膜。 X射线测量，XRD和极图分析表明，SCAF Au薄膜的（111）面外取向为随机面内取向。为了确认SCAF An膜的化学活性，我们演示了使用软光刻技术在膜上形成图案化结构的方法。该物理稳定的SCAF Au膜对链烷硫醇的化学活性至少等于物理沉积An膜的化学活性。通过微接触光刻技术还证明了在硅晶片上的宽区域上使用SCAF Au膜大规模生产微图案结构的可能性。这些表明金膜将有助于在硅片和其他基板上轻松制造各种纳米尺寸的器件。 （c）2005 Elsevier B.V.保留所有权利。

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