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首页> 外文期刊>Applied Surface Science >Important increase of negative secondary ion sensitivity during SIMS analysis by neutral cesium deposition
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Important increase of negative secondary ion sensitivity during SIMS analysis by neutral cesium deposition

机译：通过中性铯沉积，SIMS分析过程中负二次离子灵敏度的重要提高

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The Cation Mass Spectrometer (CMS) is a SIMS prototype developed in our laboratory in order to perform quantitative analysis with optimal sensitivity and high depth and lateral resolution in the MCsx+ and M- modes. For this aim, a patented neutral Cs evaporator for varying the Cs surface concentration over the whole range has been developed. The sputtering and the Cs introduction have been decoupled successfully by applying simultaneously Xy+ bombardment and neutral Cs deposition. X stands for any element except Cs. Currently the CMS is equipped with a Cs+ and a Ga+ gun. These guns are used for studying the useful yield variations of negative secondary ions (Si-, Al-, Ni-, In-, P-) with respect to the Cs surface concentration. Furthermore, the observed variations of the useful yield were linked to work function shifts. Qualitative agreement with the predictions of the electron tunnelling model are obtained. Several applications give further evidence of successful optimization of the useful yield for elements with high electron affinity. (c) 2006 Elsevier B.V. All rights reserved.
机译：阳离子质谱仪（CMS）是我们实验室开发的SIMS原型，旨在在MCsx +和M-模式下以最佳灵敏度，高深度和横向分辨率进行定量分析。为了这个目的，已经开发了专利的中性Cs蒸发器，用于在整个范围内改变Cs表面浓度。通过同时施加Xy +轰击和中性Cs沉积，已成功地将溅射和Cs引入分离。 X代表C以外的任何元素。目前，CMS配备有Cs +和Ga +枪。这些喷枪用于研究负二次离子（Si，Al，Ni，In，P-）相对于Cs表面浓度的有用的产率变化。此外，观察到的有用产量的变化与功函数的变化有关。得到与电子隧穿模型的预测的定性一致性。一些应用进一步证明了成功优化具有高电子亲和力的元素的有用产率。 （c）2006 Elsevier B.V.保留所有权利。

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