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Optical and electrical properties of different oriented CVD diamond films

机译:不同取向的CVD金刚石薄膜的光电性能

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Due to different oriented diamond films having different properties, in this paper optical and electrical properties of different oriented diamond films have been investigated. The measured results indicate diamond films are of high quality and the properties of the (001)-oriented diamond film are better than those of the (111)-oriented one. Refractive index and extinction coefficient of (001)-oriented diamond film in the wavelength range of 2.5-12.5 mu m is 2.391 and in the order of 10(-5), respectively. And for the (111)-oriented one it is 2.375 and in the order of 10(-4). The dark current of the (001)-oriented diamond film is 33.7 nA under an applied electric field of 100 kV/cm. The resistivity of the (001)-oriented diamond film obtained is about 2.33 x 10(10) Omega cm. The current of (001)-oriented diamond film is almost no change with the time testing. (c) 2005 Elsevier B.V. All rights reserved.
机译:由于不同取向的金刚石膜具有不同的性能,因此本文研究了不同取向的金刚石膜的光学和电学性质。测量结果表明金刚石膜是高质量的,并且(001)取向的金刚石膜的性能优于(111)取向的金刚石膜。 (001)取向金刚石膜在2.5-12.5μm波长范围内的折射率和消光系数分别为2.391和10(-5)的数量级。对于面向(111)的那个,它是2.375,大约是10(-4)。 (001)取向的金刚石膜的暗电流在100kV / cm的施加电场下为33.7nA。获得的(001)-取向金刚石膜的电阻率约为2.33×10(10)Ω·cm。 (001)取向金刚石膜的电流随时间测试几乎没有变化。 (c)2005 Elsevier B.V.保留所有权利。

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