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Ge_(1-x)C_x double-layer antireflection and protection coatings

机译：Ge_（1-x）C_x双层减反射保护膜

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摘要

The antireflection Germanium carbide (Ge_(1-x)C_x) coating, deposited using RF reactive sputtering, on both sides of ZnS substrate wafer has been developed. The infrared (IR) transmittance spectra show that the IR transmittance in the wavelength region between 8 and 12 μm for the designed system Ge_(1-x)C_x/ZnS/Ge_(1-x)C_x is greatly enhanced compared to that for ZnS substrate. In addition, the double-layer coated ZnS substrate is approximately four times as hard as uncoated ZnS substrate. This investigation indicates that a double-layer Ge_(1-x)C_x coating can be used as an effective antireflection and protection coating on ZnS infrared window.
机译：已经开发了使用RF反应溅射法在ZnS衬底晶片的两面上沉积的抗反射碳化锗（Ge_（1-x）C_x）涂层。红外（IR）透射光谱表明，与ZnS相比，设计系统Ge_（1-x）C_x / ZnS / Ge_（1-x）C_x在8至12μm波长范围内的IR透射率大大提高基质。另外，双层涂覆的ZnS衬底的硬度约为未涂覆的ZnS衬底的四倍。研究表明，双层Ge_（1-x）C_x涂层可以用作ZnS红外窗口上的有效抗反射和保护涂层。

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