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首页> 外文期刊>Applied Surface Science >Effect of focus position on informational properties of acoustic emission generated by laser-material interactions
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Effect of focus position on informational properties of acoustic emission generated by laser-material interactions

机译：焦点位置对激光与材料相互作用产生的声发射的信息特性的影响

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摘要

To achieve desired accuracy, precision and surface roughness during laser-material removal process, monitoring and control of the process parameters related to laser, optics, workpiece material and its motion are required. Focus position, defined as a gap between the focusing lens and the surface of the sample workpiece, is one of the most critical process parameters, which determines the projection of the intensity of the laser beam on the surface to be ablated and therefore directly affects volume and geometry of the material removed and there by machining quality. In this paper, acoustic emission (AE) generated by laser-material interactions was statistically analyzed with respect to the variations in the focus position. The study involved on-line measurements of the AE signal from the laser-material interaction zone as a function of the focus position and the width of the machined trenches. Several basic statistical parameters, e.g. average amplitude, variance and power spectrum density were analyzed to select distinct informational parameters. Pattern recognition analysis of three informational parameters based on variances within frequency diapasons of 20-180, 180-300, and 300-500 kHz was used for reliable classification of the focus position and width of the machined trenches. The results provide important information for future development of on-line monitoring and control systems for laser-material removal process. Crown Copyright (c) 2006 Published by Elsevier B.V. All rights reserved.
机译：为了在激光材料去除过程中达到所需的精度，精度和表面粗糙度，需要监视和控制与激光，光学器件，工件材料及其运动有关的过程参数。聚焦位置（定义为聚焦透镜与样品工件表面之间的间隙）是最关键的工艺参数之一，它确定激光束强度在待烧蚀表面上的投射，从而直接影响体积以及所加工材料的几何形状以及加工质量。本文针对焦点位置的变化对激光与材料相互作用产生的声发射（AE）进行了统计分析。这项研究涉及对来自激光材料相互作用区域的AE信号进行在线测量，这些信号是聚焦位置和加工沟槽宽度的函数。几个基本的统计参数，例如分析平均幅度，方差和功率谱密度，以选择不同的信息参数。基于20-180、180-300和300-500 kHz频率分布内的方差对三个信息参数进行模式识别分析，可对加工沟槽的焦点位置和宽度进行可靠分类。研究结果为激光材料去除过程在线监控系统的未来开发提供了重要的信息。官方版权（c）2006，Elsevier B.V.保留所有权利。

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