Mathematical design of linear action masks for binary and ternary composition spread film library

Yukio Yamamoto; Ryota Takahashi; Yuji Matsumoto; Toyohiro Chikyow; Hideomi Koinuma

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Mathematical design of linear action masks for binary and ternary composition spread film library

机译：用于二元和三元组成的散片库的线性动作掩模的数学设计

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摘要

Composition spread is a powerful method to search for new functional materials. In this paper, we list and discuss various continuous composition spread techniques, and propose a new combinatorial masking system for concurrent fabrication of binary and of ternary phase diagrams in which compositions of each component cover the full range of 0-100%.

机译：成分传播是搜索新功能材料的有力方法。在本文中，我们列出并讨论了各种连续的成分扩散技术，并提出了一种新的组合掩膜系统，用于同时制造二元和三元相图，其中每个成分的组成都覆盖了0-100％的整个范围。

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来源
《Applied Surface Science》 |2004年第3期|p.9-13|共5页
作者
Yukio Yamamoto; Ryota Takahashi; Yuji Matsumoto; Toyohiro Chikyow; Hideomi Koinuma;
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作者单位

National Institute of Material Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
combinatorial technology; composition spread; ternary phase diagram;

机译：组合技术成分扩散三元相图;

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2. Computer design of combinatorial shadow mask for ternary composition spread library [J] . R. Takahashi, Y. Matsumoto, H. Koinuma Measurement Science & Technology . 2005,第1期

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3. Amorphous stability of HfO_2 based ternary and binary composition spread oxide films as alternative gate dielectrics [J] . K. Hasegawa, P. Ahmet, N. Okazaki, Applied Surface Science . 2004,第1a3期

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Mathematical design of linear action masks for binary and ternary composition spread film library

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