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首页> 外文期刊>Applied Surface Science >Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition
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Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition

机译：通过脉冲激光沉积连续地扩散过渡金属氧化物的成分薄膜

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摘要

We have designed an improved pulsed-laser deposition-continuous composition-spread (PLD-CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD-CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rtation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO_3 and CaRuO_3. Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in Sr_xCa_(x-1)RuO_3 can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate.
机译：我们设计了一种改进的脉冲激光沉积连续成分扩散（PLD-CCS）系统，该系统克服了与早期相关技术相关的难题。我们新的PLD-CCS系统基于激光发射，目标交换和基板平移/摆放之间精确控制的同步，并且比早期的基于PLD的方法具有更大的灵活性和控制力。最重要的是，在整个组成范围内，沉积能和薄膜厚度保持恒定，并且所得样品足够大，可以通过常规技术进行表征。我们制造了由SrRuO_3和CaRuO_3组成的二元合金成分扩散膜。来自两个不同陶瓷靶的交替烧蚀导致原位合金形成，并且Sr_xCa_（x-1）RuO_3中的x值可以沿基材的一个方向从0线性变化到1（或在任意较小的范围内）。

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