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Wettability analysis of laser deposited Ti:Sapphire

机译:激光沉积钛蓝宝石的润湿性分析

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The wetting properties for materials in the optical and microelectronic sector are of prime importance for a variety of process and preparation steps. Etching, and wafer direct bonding are only two of the relevant areas of application. Laser deposited Ti:Sapphire holds strong relevance for potential application on micro-electronic and micro-optical integration. The analysis of their wettability performance is therefore of relevance for potential engineering and manufacturing processes. In this paper, we evaluate the wettability of the deposited film systems, dependent on deposition parameters, to determine the polar and dispersive intermolecular forces of the material by using a control system of liquids. An interpretation of the results, in view of the deposition parameters and potential manufacturing applications is attempted.
机译:光学和微电子领域材料的润湿特性对于各种工艺和制备步骤至关重要。蚀刻和晶片直接键合只是应用的两个相关领域。激光沉积的Ti:Sapphire具有潜在的微电子和微光学集成应用潜力。因此,对它们的润湿性能的分析与潜在的工程和制造过程有关。在本文中,我们根据沉积参数评估沉积膜系统的润湿性,以通过使用液体控制系统确定材料的极性和分散分子间力。尝试根据沉积参数和潜在的制造应用来解释结果。

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