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首页> 外文期刊>Applied Surface Science >Flexible fabrication of microlenses in polymer layers with excimer laser ablation
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Flexible fabrication of microlenses in polymer layers with excimer laser ablation

机译：准分子激光烧蚀可在聚合物层中灵活地制造微透镜

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摘要

Excimer laser ablation is a valuable microfabrication technology, which is particularly well-suited for surface structuring of polymers because of their excellent UV absorption properties and highly non-thermal ablation behavior. In this paper, we propose a fabrication technique for microlenses and arrays of microlenses using this technology and report on the present status of experimental results. The process is based on scanning a polymer surface with a pulsed excimer beam along well-chosen multiple concentric contours and in this way microlenses of arbitrary shape can be realized. Although our current experimental results are limited to structures in polycarbonate, the technique can be applied to any material suitable for excimer ablation of microoptics. The choice of ablation parameters and the selection of contour speeds and radii are discussed. Optical performance and lens surface quality are evaluated by imaging experiments, scanning electron microscopy and profilometer measurements. Due to the non-contact and direct-write nature of laser ablation, the proposed technique offers―contrary to many competing microfabrication processes―the powerful ability to insert microoptical functionality on top of optoelectronic components in a late phase of a heterogeneous assembly.
机译：准分子激光烧蚀是一种有价值的微细加工技术，由于其出色的紫外线吸收性能和高度非热烧蚀性能，特别适合于聚合物的表面结构化。在本文中，我们提出了使用该技术制造微透镜和微透镜阵列的技术，并报告了实验结果的现状。该方法基于沿着精心选择的多个同心轮廓用脉冲准分子光束扫描聚合物表面，从而可以实现任意形状的微透镜。尽管我们目前的实验结果仅限于聚碳酸酯的结构，但该技术可以应用于任何适合微光学的准分子烧蚀的材料。讨论了消融参数的选择以及轮廓速度和半径的选择。通过成像实验，扫描电子显微镜和轮廓仪测量来评估光学性能和镜片表面质量。由于激光烧蚀的非接触和直接写入特性，与许多竞争的微加工工艺相反，该提议的技术提供了在异质组装的后期将微光学功能插入光电组件顶部的强大能力。

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