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Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis

机译：椭圆偏振光谱法研究喷雾热解法制备的氧化铟锡薄膜的折射率分布

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摘要

Spectroscopic ellipsometry (SE) has proven to be a very powerful diagnostic for thin film characterisation. It was used to determine thin film parameters such as film thickness and optical functions of polycrystalline tin-doped indium oxide (ITO) films deposited by spray pyrolysis onto Pyrex substrates. Dielectric ITO films often present microstructures which give rise to a variation of the refractive index with the distance from substrate. In this work, it was found that the fit between ellipsometric data and optical models results could be significantly improved when it was assumed that the refractive index of ITO films varied across the upper 60 nm near the film surface. Also, the surface roughness was modelled and compared with that given by the atomic force microscope (A.FM). (C) 2002 Elsevier Science B.V. All rights reserved. [References: 31]
机译：椭圆偏振光谱法（SE）已被证明是用于薄膜表征的非常强大的诊断工具。它用于确定薄膜参数，例如通过喷雾热解沉积到Pyrex衬底上的多晶掺锡氧化铟（ITO）薄膜的薄膜厚度和光学功能。介电ITO膜通常具有微观结构，该微观结构会导致折射率随距基材的距离而变化。在这项工作中，发现当假设ITO膜的折射率在膜表面附近的整个60 nm处变化时，椭圆偏振数据与光学模型结果之间的拟合度可以得到显着改善。此外，对表面粗糙度进行建模，并与原子力显微镜（A.FM）给出的粗糙度进行比较。 （C）2002 Elsevier Science B.V.保留所有权利。 [参考：31]

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