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Investigation of interactions between ultrafast laser beams and screen- printed silver nanopaste films

机译:研究超快激光束与丝网印刷银纳米膏膜之间的相互作用

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摘要

This study aims to investigate the interaction between ultrafast laser beams and screen-printed silver (Ag) nanopaste films for strain sensors. After single pulse ablation of Ag nanopaste films with a thickness of 4.58 the ablation threshold was approximately 0.2 J/cm(2). By increasing single pulse laser fluences from 0.78 J/cm(2) to 1.87 J/cm(2), the laser-ablated line widths and depths of Ag nanopaste films were ranging from 22 +/- 0.1 mu m and 4 +/- 0.09 mu m to 44.8 +/- 1.4 mu m and 4.2 +/- 0.05 respectively. The sheet resistance of laser-processed Ag nanopaste films was measured by a four-point probe instrument. When the single pulse laser fluences set from 4.7 mJ/cm(2) to 1.97 J/cm(2), the measured sheet resistances near the laser-ablated line edge of 0.5 mm were 59.52 +/- 0.76 m Omega/sq and 115.83 +/- 6.11 m Omega/sq, respectively. The optimal ultrafast laser processing parameters consisting of the areal laser fluence of 47.4 J/cm(2), the laser pulse repetition rate of 300 kHz, the scanning speed of galvanometers of 500 mm/s, and the overlapping rate of laser spots of 96.1% were used to pattern strain sensors with transversal and longitudinal electrode structures on Ag film/glass substrates.
机译:这项研究旨在调查应变传感器的超快激光束与丝网印刷银(Ag)纳米粘贴膜之间的相互作用。在单脉冲烧蚀厚度为4.58的Ag纳米膏膜之后,烧蚀阈值约为0.2 J / cm(2)。通过将单脉冲激光通量从0.78 J / cm(2)增加到1.87 J / cm(2),Ag纳米粘贴膜的激光烧蚀线宽和深度范围为22 +/- 0.1微米和4 +/- 0.09微米至44.8 +/- 1.4微米和4.2 +/- 0.05。用四点探针仪测量激光处理的Ag纳米膏膜的薄层电阻。当单脉冲激光通量设置为4.7 mJ / cm(2)至1.97 J / cm(2)时,在激光烧蚀的线边缘0.5 mm附近测得的薄层电阻为59.52 +/- 0.76 m Omega / sq和115.83分别为+/- 6.11 m Omega / sq。最佳的超快激光加工参数包括面激光通量为47.4 J / cm(2),激光脉冲重复频率为300 kHz,振镜的扫描速度为500 mm / s,激光点的重叠率为96.1 %用于在Ag膜/玻璃衬底上形成具有横向和纵向电极结构的应变传感器。

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