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Quantification and mapping of elastic strains in ferroelectric [BaTiO_3]_((1-x)Λ) superlattices

机译:铁电体[BaTiO_3] _((1-x)Λ)超晶格中弹性应变的量化和映射

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摘要

We report on quantification and elastic strain mapping in two artificial [BaZrO3](x)(Lambda)/BaTiO3]((1,x)Lambda) (BZ(x)(Lambda)/BT(1-x)Lambda) superlattices having periods of A = 6.6 nm and A = 11 nm respectively, grown on (0 0 1) SrTiO3 single crystal substrate by pulsed laser deposition technique. The methodology consists of a combination of high-resolution scanning transmission electron microscopy and nanobeam electron diffraction associated with dedicated algorithm for diffraction patterns processing originally developed for semiconductors to record the strains at atomic scale. Both in-plane and out-of-plane elastic strains were then determined at 2 nm spatial resolution and their average values were used to map the strains along and transverse to the epitaxial growth direction of both samples to determine its variation along several BZ/BT interfaces. In addition, the variation of the width of the inter-diffusion BT/BZ interfaces and intermixing between different layers are estimated. The obtained width average value measured in these inter-diffusion interfaces vary from 8 to 12% and from 9 to 11% for both superlattices having Lambda = 6.6 nm and Lambda = 11 nm respectively. These inter-diffusion interfaces and the inherent elastic strains due to the confined layers of the superlattices are known to be the most important parameters, responsible of the change in their functional properties.
机译:我们报告量化和弹性应变映射在两个人造[BaZrO3](x)(Lambda)/ BaTiO3]((1,x)Lambda)(BZ(x)(Lambda)/ BT(1-x)Lambda)具有通过脉冲激光沉积技术在(0 0 1)SrTiO3单晶衬底上分别生长了A = 6.6 nm和A = 11 nm的周期。该方法包括高分辨率扫描透射电子显微镜和纳米束电子衍射,以及专用于衍射图样处理的专用算法,该算法最初是为半导体开发的,用于在原子级记录应变。然后在2 nm的空间分辨率下确定面内和面外弹性应变,并使用它们的平均值绘制沿两个样品的外延生长方向和与之垂直的应变图,以确定其沿几个BZ / BT的变化接口。另外,估计了相互扩散的BT / BZ界面的宽度的变化以及不同层之间的相互混合。在这些相互扩散界面中测得的获得的宽度平均值,对于λ= 6.6nm和λ= 11nm的两个超晶格,分别在8%至12%和9%至11%之间变化。众所周知,由于超晶格的受限层,这些相互扩散的界面和固有的弹性应变是最重要的参数,是其功能特性变化的原因。

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