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Super-resolution AFM imaging based on compressive sensing

机译：基于压缩感测的超分辨率AFM成像

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摘要

Atomic force microscopy (AFM) is a powerful and ultra-precision instrument in nano-scale, which is widely used in many fields. It is a complex and time-consuming process for AFM imaging. Most of the original AFM images are with low resolution. For nano-scale measurement and imaging, it is very important to obtain super-resolution images. In most cases, super-resolution imaging takes a long time and the quality of imaging is unsatisfactory. In this regard, a novel super-resolution imaging method based on compressed sensing (CS) technology is proposed in AFM. In the experiment, six samples with different morphology were used to test the effect of super-resolution image reconstruction with different upscaling factors (2, 3 and 4). The quality of reconstructed image is analyzed and evaluated by image evaluation metrics (PSNR and SSIM). The relationship between the reconstruction quality of different images and the actual TV or TV/R of sample images is analyzed, which can provide a preliminary basis for predicting the imaging quality. Comparing with other super-resolution imaging methods, the proposed method has achieved better imaging effect both visually and quantitatively. In summary, super-resolution imaging method based on CS not only has high imaging quality but also has high speed.
机译：原子力显微镜（AFM）是一种以纳米级的强大和超精密仪器，其广泛应用于许多领域。这是AFM成像的复杂和耗时的过程。大多数原始AFM图像都具有低分辨率。对于纳米级测量和成像，获得超级分辨率的图像非常重要。在大多数情况下，超级分辨率成像需要很长时间，成像质量不满意。在这方面，在AFM中提出了一种基于压缩感测（CS）技术的新型超分辨率成像方法。在实验中，使用具有不同形态学的六个样本来测试不同升高因子（​​2,3和4）的超分辨率图像重建的效果。通过图像评估度量（PSNR和SSIM）分析和评估重建图像的质量。分析了不同图像的重建质量与样本图像的实际电视或电视/ R之间的关系，这可以为预测成像质量提供初步依据。与其他超分辨率成像方法进行比较，所提出的方法在视觉上和定量上实现了更好的成像效果。总之，基于CS的超分辨率成像方法不仅具有高成像质量，而且具有高速。

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