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首页> 外文期刊>Applied Surface Science >Quantification of surface contamination on optical glass via sensitivity-improved calibration-free laser-induced breakdown spectroscopy
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Quantification of surface contamination on optical glass via sensitivity-improved calibration-free laser-induced breakdown spectroscopy

机译：通过灵敏度改进的无校准激光诱导击穿光谱定量光学玻璃表面污染的量化

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摘要

We report quantitative analysis of manufacturing-induced trace contaminants of optical glass surfaces by laser-induced breakdown spectroscopy (LIBS). Therefore, spectra recorded with an echelle spectrometer coupled to a gated detector were analysed using a calibration-free LIBS approach based on the calculation of the spectral radiance of a plasma in local thermodynamic equilibrium. The measurements were carried out in experimental conditions that enable both accurate modelling of plasma emission and high sensitivity for trace element analysis. Depth-resolved measurements were performed by recording spectra for successive laser pulses applied to the same irradiation sites. Validated via inductively coupled plasma atomic emission spectroscopy for the bulk glass composition, the measurements evidence a surface contamination that originates from polishing during glass manufacturing. The measured penetration depths of the contaminants are discussed in the frame of the underlying mechanisms of surface contamination and related to the changes of the optical properties evidenced by ellipsometric measurements. Demonstrated here for optical glass, the sensitivity-improved calibration-free LIBS approach can be used to quantify contaminations of surfaces in all kind of technological applications.
机译：我们通过激光诱导的击穿光谱（Libs）报告了对光学玻璃表面的制造型痕量污染物的定量分析。因此，使用校准的Libs方法分析用耦合到门控检测器的呼应光谱仪记录的光谱，基于局部热力学平衡中等离子体的光谱辐射的计算。测量在实验条件下进行，可实现血浆发射的准确建模和痕量元素分析的高灵敏度。通过记录施加到同一照射位点的连续激光脉冲的光谱来执行深度分辨的测量。通过电感耦合等离子体原子发射光谱验证用于散装玻璃组合物，测量证据证据了玻璃制造期间抛光的表面污染。在表面污染的底层机制的框架中讨论了污染物的测量渗透深度，并且与通过椭圆测量测量证明的光学性质的变化有关。这里证明了光学玻璃，灵敏度改进的无校准Libs方法可用于量化各种技术应用中表面的污染。

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