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首页> 外文期刊>Applied Surface Science >Electrical characterization of carbon plasma generated by excimer laser ablation of graphite
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Electrical characterization of carbon plasma generated by excimer laser ablation of graphite

机译：石墨准分激光消融产生的碳等离子体的电学特性

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摘要

The vacuum expansion of a transient carbon plasma produced by KrF excimer laser at moderate fluences is investigated by separating different types of ions with an electrostatic energy analyzer. In the retarding field of the analyzer, the ion current reveals a multi-peak structure and the signal deconvolution allows obtaining information on the ion abundance and thermal velocity. A significant increase of C2+ and C1+ fast ions production with the laser pulse energy is observed, while the amount of slower singly charged ions in the thermal plasma part is less affected by the irradiation conditions. By time-integration of the recorded current, the total collected charge vs. retarding potential characteristic is built and a derivative method allows obtaining the energy distribution function on the plasma plume axis, in good agreement with the shifted Maxwell-Boltzmann distribution. Future developments of this method are possible through comparison with theoretical fractional ion populations.
机译：通过将不同类型的离子与静电能量分析仪分离，研究由KRF准分子激光器产生的瞬时碳等离子体的真空膨胀。在分析仪的延迟场中，离子电流揭示了多峰结构，并且信号折耦允许获得关于离子丰度和热速度的信息。观察到具有激光脉冲能量的C2 +和C1 +快速离子产生的显着增加，而热等离子体部分中的单个电荷的离子的较慢量受到照射条件的影响。通过录制电流的时间集成，构建了总收集的电荷与延迟电位特性，并且衍生方法允许在等离子体漏洞轴上获得能量分布功能，与移位的Maxwell-Boltzmann分布良好。通过与理论分数离子群体的比较，这种方法的未来发展是可能的。

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