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Laser-induced digital oxidation for copper-based flexible photodetectors

机译：激光诱导的基于铜柔性光电探测器的数字氧化

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摘要

Copper oxide compounds (CuxO) with bandgaps of 1.3-2.1 eV (CuO) and 2.1-2.6 eV (Cu2O) have been investigated as promising p-type semiconducting materials. CuxO is generally obtained by deposition or thermal oxidation, but those methods are not optimal for flexible substrates. Furthermore, additional patterning steps are required to fabricate devices.We present an easy, controllable method to fabricate a metal-semiconductor-metal (MSM) photodetector using laser-induced oxidation of a thin Cu film. After laser irradiation, the Cu film is heated under ambient conditions, and this leads to a thermal oxidation reaction, in which Cu oxide is monolithically formed in the Cu film and a Cu-CuxO-Cu MSM structure is produced. Since the laser offers localized heating, an arbitrary CuxO pattern can be written in the Cu film by spatially controlled heating. In addition, by optimizing the heating time, the laserinduced oxidation can be successfully performed even on a flexible substrate. To study the laser-induced oxidation, we examined the correlation between laser parameters and the oxidation pattern and analyzed the composition using scanning electron microscopy, Raman spectroscopy, and X-ray photoemission spectroscopy. Furthermore, we measured the transient photoresponse and employed scanning photocurrent microscopy to investigate the mechanism of carrier transport behavior.
机译：已研究具有1.3-2.1eV（CuO）和2.1-2.6eV（Cu2O）的带隙的氧化铜化合物（Cuxo）作为有前途的p型半导体材料。通过沉积或热氧化通常通过沉积或热氧化而获得。，但这些方法对柔性基材不适。此外，需要额外的图案化步骤来制造设备.WE呈现一种简单，可控的方法，用于使用激光诱导的薄Cu膜的氧化来制造金属 - 半导体 - 金属（MSM）光电探测器。激光照射后，将Cu膜在环境条件下加热，这导致热氧化反应，其中Cu氧化物在Cu膜中形成单片，并制备Cu-杂环铜MSM结构。由于激光器提供局部加热，因此可以通过空间控制的加热在Cu膜中写入任意的杂环图案。另外，通过优化加热时间，即使在柔性基板上也可以成功地进行激光诱导的氧化。为了研究激光诱导的氧化，我们检查了激光参数和氧化模式之间的相关性，并使用扫描电子显微镜，拉曼光谱和X射线照相光谱分析了组合物。此外，我们测量了瞬时光响应，采用扫描光电流显微镜，以研究载流子传输行为的机制。

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