• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Arabian Journal for Science and Engineering >A Low-Nonlinearity Laser Heterodyne Interferometerwith Quadrupled Resolution in the DisplacementMeasurement
【24h】

A Low-Nonlinearity Laser Heterodyne Interferometerwith Quadrupled Resolution in the DisplacementMeasurement

机译：在位移测量中具有四倍分辨率的低非线性激光外差式干涉仪

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Quantitative analysis has been applied extensively for modeling and compensation of periodic non-linearities since the invention of heterodyne laser interferometers. In this article, we mathematically analyze and modele the nonlinearity resulting from non-orthogonality and ellipticity of the polarized laser beams for a modified high-resolution nano-displacement measuring system based on a three-mode laser interferometer. Also, we present a simple method to compensate for the periodic nonlinearity in the modified system based on a two-mode type nonlinearity reduction method. The results reveal that the factor of nonlinearity reduction can reach a value of 99.9% for some special cases of deviations resulting from non-ideal polarized light. In addition to the nonlinearity compensation, we show that the resolution of the displacement measurement in the modified system is doubled and quadrupled with respect to the conventional three- and two-mode laser heterodyne interferometers, respectively.
机译：自从外差激光干涉仪问世以来，定量分析已广泛应用于周期性非线性的建模和补偿。在本文中，我们对基于三模激光干涉仪的改进型高分辨率纳米位移测量系统的偏振激光束的非正交性和椭圆性所产生的非线性进行数学分析和建模。此外，我们提出了一种简单的方法来补偿基于双模类型非线性减少方法的改进系统中的周期非线性。结果表明，在某些特殊情况下，由非理想偏振光引起的偏差，非线性降低的因子可以达到99.9％。除了非线性补偿之外，我们还表明，相对于传统的三模和二模激光外差干涉仪，改进后的系统中位移测量的分辨率分别提高了一倍和四倍。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号