Physical Approaches to the Design of Microactuators for Micro- and Nanopositioning: The Information Aspect

A. M. Petrina

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Physical Approaches to the Design of Microactuators for Micro- and Nanopositioning: The Information Aspect

机译：用于微定位和纳米定位的微执行器设计的物理方法：信息方面

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Microactuators are an important tool for precise manipulation of components and materials in nanotechnologies. The problems of design and application of microactuators for micro- and nanopositioning, microassembly, and microrobotics are considered in this paper. The basic parameters and models of piezoelectric, magnetostriction, electromagnetic, electrostatic, electrothermal, and hybrid microactuators are described. A general information approach that implies the description of physical models used in order to analyze microactuator behavior and optimize their design is considered.

机译：微致动器是精确操纵纳米技术中的组件和材料的重要工具。本文考虑了用于微型和纳米定位，微型装配和微型机器人的微型致动器的设计和应用问题。描述了压电，磁致伸缩，电磁，静电，电热和混合微致动器的基本参数和模型。考虑了一种通用信息方法，该方法隐含了对用于分析微执行器行为并优化其设计的物理模型的描述。

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来源
《Automatic Documentation and Mathematical Linguistics》 |2011年第6期|p.301-315|共15页
作者
A. M. Petrina;
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作者单位

VINITI, Russian Academy of Sciences, Russia;

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原文格式 PDF
正文语种 eng
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关键词
piezoelectric microactuators; magnetostriction microactuators; electromagnetic microactuators; electrostatic microactuators; electrothermal microactuators; micropositioning; nanopositioning; physical models; microrobotics; microassembly;

机译：压电微致动器磁致伸缩微致动器;电磁微执行器;静电微致动器;电热微致动器;微定位纳米定位物理模型微型机器人微装配;

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Physical Approaches to the Design of Microactuators for Micro- and Nanopositioning: The Information Aspect

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