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Humidity-driven deformation of ordered mesoporous silica films

机译:有序介孔二氧化硅薄膜的湿度驱动变形

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The mechanical response of two ordered mesoporous silica films on silicon substrates was investigated by in situ grazing-incidence small-angle X-ray scattering during change of relative humidity. Films were prepared by using well known approaches of evaporation-induced self-assembly (EISA) of block-copolymer templated silica precursor sols. A thick film (≈500nm) was prepared by dip coating and a thin film (≈100nm) was prepared by spin coating. Both films exhibited a distorted 2D-hexagonal arrangement of cylindrical mesopores. While for the thin film these pores were highly oriented within the film plane, the thick film was much more disordered with respect to the in-plane orientation. The evaluation of the pore lattice strain as a consequence of changing relative humidity reveals a similar magnitude of deformation and similar elastic properties in the out-of-plane direction for the two samples. However, the in-plane strains are completely different. While the thin film is essentially unstrained within the plane of the film as expected for a thin film on a rigid substrate, there seems to be a considerable in-plane strain for the thick film. This result underlines the importance of film thickness and film quality when aiming at using such systems for bioinspired bilayer actuators.
机译:通过相对湿度变化过程中的原位掠入射小角X射线散射研究了硅衬底上两个有序介孔二氧化硅薄膜的机械响应。通过使用众所周知的嵌段共聚物模板化的二氧化硅前体溶胶的蒸发诱导自组装(EISA)方法来制备膜。通过浸涂制备厚膜(≈500nm),并通过旋涂制备薄膜(≈100nm)。两种膜均显示出圆柱形中孔的二维二维六角形排列。对于薄膜,这些孔在膜平面内高度取向,而厚膜相对于面内取向则无序得多。相对湿度变化导致的孔隙晶格应变评估显示出,两个样品在面外方向具有相似的变形幅度和相似的弹性。但是,面内应变完全不同。尽管如在刚性基板上的薄膜所期望的那样,薄膜基本上在薄膜的平面内不应变,但是对于厚膜而言似乎存在相当大的面内应变。该结果强调了在将此类系统用于生物启发式双层执行器时,膜厚度和膜质量的重要性。

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