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首页> 外文期刊>Building and Environment >Contaminant particles removal by negative air ionic cleaner in industrial minienvironment for IC manufacturing processes
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Contaminant particles removal by negative air ionic cleaner in industrial minienvironment for IC manufacturing processes

机译：在IC制造工艺的工业小型环境中，通过负离子空气清洁剂去除污染物颗粒

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This study was carried out in a dosed test chamber under natural decay, negative ionic air cleaner application, as well as air mixing mechanism with negative ionic air cleaner. Among three operation modes, the air mixing mechanism with negative ionic air cleaner can reduce particles better under the flow field condition. In the air mixing, especially vigorous one (5 ACH (Air Changes per hour)), enhanced the air cleaning effect The highest removal efficiency was measured at a height of 0.6 m from the floor and it was decreased substantially with an increase in height. The relative effectiveness of negative ionic air cleaners was predicted to decrease with an increasing particle size. We also found that there was a limited horizontal diffusion of ions. The empirical curves fit based for the concentration gradient of NAI (Negative air ionization) generated was developed for estimating the NAI concentration with different heights and distances from the source of negative ionic air cleaner discharge.
机译：这项研究是在自然衰变，负离子空气滤清器应用以及带有负离子空气滤清器的空气混合机制下的带剂量试验箱中进行的。在三种运行模式中，带有负离子空气净化器的空气混合机构可以在流场条件下更好地减少颗粒。在空气混合中，特别是剧烈混合（5 ACH（每小时换气）），增强了空气净化效果。最高去除效率是在距地面0.6 m的高度处测得的，并且随着高度的增加而大大降低。预计负离子空气净化器的相对有效性会随着粒径的增加而降低。我们还发现离子的水平扩散有限。开发了基于生成的NAI（负空气电离）浓度梯度的经验曲线，以估算距负离子空气滤清器排放源不同高度和距离的NAI浓度。

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