Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom

著录项

• 来源
  《Building and Environment》 |2009年第12期|2319-2326|共8页
• 作者

  Hui-Ya Shih; Shih-Hsuan Huang; Shou-Nan Li; Sheng-Chieh Chen; Chuen-Jinn Tsai;

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• 作者单位

  Energy and Environment Research Laboratories, Industrial Technology Research Institute (ITRI), Hsin Chu, Taiwan;

  Institute of Environmental Engineering. National Chiao Tung University, No. 75 Poai Street, Hsin Chu 300, Taiwan;

  Energy and Environment Research Laboratories, Industrial Technology Research Institute (ITRI), Hsin Chu, Taiwan;

  Institute of Environmental Engineering. National Chiao Tung University, No. 75 Poai Street, Hsin Chu 300, Taiwan;

  Institute of Environmental Engineering. National Chiao Tung University, No. 75 Poai Street, Hsin Chu 300, Taiwan;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  airborne molecular contamination; gas sensors; cleanroom; preventive maintenance;

  机译：空气传播的分子污染;气体传感器整理房间;预防性的维护;