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首页> 外文期刊>Building and Environment >The development of fan filter unit with flow rate feedback control in a cleanroom
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The development of fan filter unit with flow rate feedback control in a cleanroom

机译：洁净室中带流量反馈控制的风扇过滤器单元的开发

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摘要

A new type of fan filter unit (FFU) systems was developed and evaluated in this study. Capable of controlling the volume airflow rate through a networked feedback control system, the innovative smart FFU systems can supply much more uniform airflow distribution at the exit of the FFUs than common FFUs that are commercially available in the market. The development of the smart FFU was described and the comparisons of exit airflow velocities between the smart FFU and other conventional FFUs were made. The measurements have shown that the velocity uniformity values of the exit airflow of the smart FFUs were less than 5.0% while the conventional FFUs showed the uniformity values in the range of 14.0-28.0%. In addition, the test results in this study demonstrate that smart FFU systems are capable of reaching preset airflow rates relatively quickly, i.e., within 5s, and maintaining the stable airflow supply to the cleanroom.
机译：在这项研究中，开发并评估了一种新型的风机过滤器（FFU）系统。与市场上可买到的普通FFU相比，创新的智能FFU系统能够通过网络反馈控制系统控制风量，可在FFU出口处提供均匀得多的气流分布。描述了智能FFU的发展，并对智能FFU和其他常规FFU之间的出口气流速度进行了比较。测量结果表明，智能FFU的出口气流速度均匀度值小于5.0％，而常规FFU的均匀度值在14.0-28.0％范围内。此外，这项研究的测试结果表明，智能FFU系统能够相对较快地（即在5秒内）达到预设的气流速率，并保持向洁净室的稳定气流供应。

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