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Electrochemical Synthesis of Ceramic Materials. 4. Electrophoretic Deposition of Metal Nitride Ceramic Precursors

机译:陶瓷材料的电化学合成。 4.氮化金属陶瓷前体的电泳沉积

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We have prepared metal nitride ceramic precursors by anodic dissolution of the corresponding metal in liquid NH_3 electrolyte solutions and then deposited coatings of these precursors onto n-Si substrates by electrophoresis. X-ray diffraction and electron microscopy indicate that calcination of the precursor-coated substrates yields coatings of AlN, δ-NbN, and Ni_3N. Precursor coatings are formed by applying fields greater than 10 V/cm between electrodes in a CH_3CN suspension of the precursor. The positively charged precursor particles deposit selectively on the cathode. Subsequent calcination in flowing NH_3 or Ar yields the metal nitride coating. The Ni_3N coating was prepared by calcining the precursor at 375℃ in NH_3, while the AlN and NbN precursor coatings were prepared by calcination at 1100℃ in NH_3 and 800℃ in Ar, respectively.
机译:我们通过将相应的金属在液态NH_3电解质溶液中进行阳极溶解来制备金属氮化物陶瓷前驱体,然后通过电泳将这些前驱体的涂层沉积到n-Si衬底上。 X射线衍射和电子显微镜表明,前体涂覆的基底的煅烧产生AlN,δ-NbN和Ni_3N的涂层。通过在前体的CH_3CN悬浮液中的电极之间施加大于10 V / cm的电场来形成前体涂层。带正电的前体颗粒选择性地沉积在阴极上。随后在流动的NH_3或Ar中煅烧,得到金属氮化物涂层。通过在NH_3中于375℃下煅烧前驱体来制备Ni_3N涂层,而通过在NH_3中在1100℃下煅烧和在Ar中800℃下煅烧来制备AlN和NbN前驱体涂层。

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